Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11979972 | X-ray source with an electromagnetic pump | Per Takman, Ulf Lundström, Tomi Tuohimaa | 2024-05-07 |
| 11963286 | X-ray source and method for generating X-ray radiation | Per Takman, Yuli Wang, Shiho Tanaka | 2024-04-16 |
| 11910515 | X-ray source with an electromagnetic pump | Ulf Lundström, Per Takman, Tomi Tuohimaa | 2024-02-20 |
| 11742171 | Method for imaging a sample | — | 2023-08-29 |
| 11651927 | Electron collector with oblique impact portion | Tomi Tuohimaa, Ulf Lundström | 2023-05-16 |
| 11342154 | X-ray source and method for generating x-ray radiation | Per Takman, Yuli Wang, Shiho Tanaka | 2022-05-24 |
| 11257651 | Determining width and height of electron spot | Per Takman, Ulf Lundström | 2022-02-22 |
| 10971323 | Semiconductor X-ray target | Andrii Sofiienko, Ulf Lundström | 2021-04-06 |
| 10818468 | Liquid target X-ray source with jet mixing tool | Tomi Tuohimaa, Göran Johansson | 2020-10-27 |
| 9713239 | Laser produced plasma EUV light source | Alexander N. Bykanov, Igor V. Fomenkov, David C. Brandt | 2017-07-18 |
| 7732793 | Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source | Alexander I. Ershov, William Marx, Norbert Bowering, Oleh Khodykin, Igor V. Fomenkov | 2010-06-08 |
| 7598509 | Laser produced plasma EUV light source | Alexander I. Ershov, William N. Partlo, Norbert Bowering | 2009-10-06 |
| 7476886 | Source material collection unit for a laser produced plasma EUV light source | Alexander N. Bykanov | 2009-01-13 |
| 7453077 | EUV light source | Norbert Bowering, Rodney D. Simmons | 2008-11-18 |
| 7365351 | Systems for protecting internal components of a EUV light source from plasma-generated debris | Norbert Bowering | 2008-04-29 |
| 7239686 | Method and arrangement for producing radiation | Magnus Berglund, Oscar Hemberg, Hans Hertz, Lars Rymell | 2007-07-03 |
| 7109503 | Systems for protecting internal components of an EUV light source from plasma-generated debris | Norbert Bowering, Alexander N. Bykanov, Oleh Khodykin, Alexander I. Ershov, William N. Partlo | 2006-09-19 |
| 6760406 | Method and apparatus for generating X-ray or EUV radiation | Hans Hertz, Oscar Ĥemberg, Lars Rymell, Magnus Berglund | 2004-07-06 |
| 6263004 | Laser | Magnus Arvidsson, Carsten Lindstrom, Martin Holmgren | 2001-07-17 |