Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7239686 | Method and arrangement for producing radiation | Bjorn Hansson, Oscar Hemberg, Hans Hertz, Lars Rymell | 2007-07-03 |
| 6760406 | Method and apparatus for generating X-ray or EUV radiation | Hans Hertz, Oscar Ĥemberg, Lars Rymell, Bjorn Hansson | 2004-07-06 |
| 6002744 | Method and apparatus for generating X-ray or EUV radiation | Hans Hertz, Lars Malmqvist, Lars Rymell | 1999-12-14 |