Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12033268 | Volumetric dynamic depth delineation | Olivia G. Weaver, Kyle Russell, James Roznick, Chanler Crowe Cantor, Michael Yohe | 2024-07-09 |
| 8075732 | EUV collector debris management | William N. Partlo, Richard L. Sandstrom, Igor V. Fomenkov, Alexander I. Ershov, William Oldham +1 more | 2011-12-13 |
| 7732793 | Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source | Alexander I. Ershov, Norbert Bowering, Bjorn Hansson, Oleh Khodykin, Igor V. Fomenkov | 2010-06-08 |
| 7355191 | Systems and methods for cleaning a chamber window of an EUV light source | Alexander N. Bykanov | 2008-04-08 |
| 7196342 | Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source | Alexander I. Ershov | 2007-03-27 |