| 9669334 |
Material supply apparatus for extreme ultraviolet light source having a filter constructed with a plurality of openings fluidly coupled to a plurality of through holes to remove non-target particles from the supply material |
Igor V. Fomenkov, William N. Partlo, Gregory O. Vaschenko |
2017-06-06 |
| 9029813 |
Filter for material supply apparatus of an extreme ultraviolet light source |
Igor V. Fomenkov, William N. Partlo, Georgiy O. Vaschenko |
2015-05-12 |
| 8075732 |
EUV collector debris management |
William N. Partlo, Richard L. Sandstrom, Igor V. Fomenkov, Alexander I. Ershov, William Marx +1 more |
2011-12-13 |
| 7141806 |
EUV light source collector erosion mitigation |
William N. Partlo, Alexander I. Ershov, Igor V. Fomenkov, David W. Myers |
2006-11-28 |
| 7075699 |
Double hidden flexure microactuator for phase mirror array |
Yijian Chen, Yashesh Shroff |
2006-07-11 |
| 5233460 |
Method and means for reducing speckle in coherent laser pulses |
William N. Partlo |
1993-08-03 |
| 4450537 |
Monolithically integrated read-only memory |
— |
1984-05-22 |
| 4441036 |
Monolithically integrated circuit with connectible and/or disconnectible circuit portions |
— |
1984-04-03 |
| 4396996 |
Monolithic static memory cell and method for its operation |
— |
1983-08-02 |
