Issued Patents All Time
Showing 1–25 of 125 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10966308 | EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods | William N. Partlo, Daniel John William Brown, Igor V. Fomenkov | 2021-03-30 |
| 10667377 | Extreme ultraviolet light source | Robert Jay Rafac, Daniel John William Brown, Kai-Chung Hou | 2020-05-26 |
| 9390827 | EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods | William N. Partlo, Daniel John William Brown, Igor V. Fomenkov | 2016-07-12 |
| 9380691 | Adaptive laser system for an extreme ultraviolet light source | Yezheng Tao, Daniel John William Brown, Alexander Anthony Schafgans, Michael David Caudill, Daniel J. Golich +1 more | 2016-06-28 |
| RE45957 | Regenerative ring resonator | Hong Ye, Rostislav Rokitski, Daniel J. W. Brown, Robert Jay Rafac | 2016-03-29 |
| 9232623 | Extreme ultraviolet light source | Robert Jay Rafac, Daniel John William Brown, Kai-Chung Hou | 2016-01-05 |
| 9018561 | High power seed/amplifier laser system with beam shaping intermediate the seed and amplifier | Daniel J. W. Brown, Thomas Hoffmann, Jason ROBINSON, Craig W Unick | 2015-04-28 |
| 8958143 | Master oscillator—power amplifier drive laser with pre-pulse for EUV light source | Kai-Chung Hou, William N. Partlo, Daniel John William Brown, Igor V. Fomenkov | 2015-02-17 |
| 8848277 | System and method for protecting a seed laser in an EUV light source with a Bragg AOM | Jonathan D. Grava | 2014-09-30 |
| 8810902 | Multi-pass optical apparatus | — | 2014-08-19 |
| 8811440 | System and method for seed laser mode stabilization | — | 2014-08-19 |
| 8737438 | Systems and methods for implementing an interaction between a laser shaped as line beam and a film deposited on a substrate | Palash P. Das, Thomas Hofmann, Jesse D. Davis | 2014-05-27 |
| 8653437 | EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods | William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov | 2014-02-18 |
| 8654438 | Master oscillator-power amplifier drive laser with pre-pulse for EUV light source | Kai-Chung Hou, William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov | 2014-02-18 |
| 8526481 | Extendable electrode for gas discharge laser | Tae (Mark) H. Chung, Richard C. Ujazdowski | 2013-09-03 |
| 8462425 | Oscillator-amplifier drive laser with seed protection for an EUV light source | Kai-Chung Hou, William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov | 2013-06-11 |
| 8446928 | Extendable electrode for gas discharge laser | Tae (Mark) H. Chung, Richard C. Ujazdowski | 2013-05-21 |
| 8379687 | Gas discharge laser line narrowing module | Raymond F. Cybulski, Robert A. Bergstedt, William N. Partlo, Gon Wang | 2013-02-19 |
| 8295316 | Method and system for managing light source operation | Robert P. Akins, Daniel J. W. Brown, Matthew R. Graham, Kevin W. Zhang, Patrick L. Nelissen | 2012-10-23 |
| 8265109 | Systems and methods for implementing an interaction between a laser shaped as line beam and a film deposited on a substrate | Palash P. Das, Thomas Hofmann, Jesse D. Davis | 2012-09-11 |
| 8170078 | Laser system | Alexander I. Ershov, William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov, Robert A. Bergstedt +1 more | 2012-05-01 |
| 8158960 | Laser produced plasma EUV light source | Georgiy O. Vaschenko, Alexander I. Ershov | 2012-04-17 |
| 8144740 | Laser system | Daniel J. W. Brown, William N. Partlo | 2012-03-27 |
| 8138487 | System, method and apparatus for droplet catcher for prevention of backsplash in a EUV generation chamber | Georgiy O. Vaschenko, William N. Partlo, Igor V. Fomenkov, Alexander I. Ershov, David C. Brandt +1 more | 2012-03-20 |
| 8126027 | Line narrowing module | J. Martin Algots, Robert A. Bergstedt, William N. Partlo, German E. Rylov | 2012-02-28 |