Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12085862 | Laser system for source material conditioning in an EUV light source | Spencer Rich, Sean W. McGrogan | 2024-09-10 |
| 11064987 | Volumetric grafts for treatment of fistulae and related methods and systems | F. Joseph Obermiller, Michael C. Hiles, Clay Fette | 2021-07-20 |
| 10903635 | In-ground enclosure system | Kevin T. Aycock, Kevin Goldstein, Marcela Torres, Robert J. Schilling | 2021-01-26 |
| 10681795 | Apparatus for and method of source material delivery in a laser produced plasma EUV light source | Alexander I. Ershov, David Robert Evans | 2020-06-09 |
| 10615583 | In-ground enclosure system | Kevin T. Aycock, Robert J. Schilling, Marcela Torres, Kevin Goldstein, Walter Pierce | 2020-04-07 |
| 10234769 | Monitoring system for an optical lithography system | Andrei Dorobantu, Joshua Jon Thornes, Kevin M. O'Brien | 2019-03-19 |
| 10237960 | Apparatus for and method of source material delivery in a laser produced plasma EUV light source | Alexander I. Ershov, David Robert Evans | 2019-03-19 |
| 9956315 | Fistula graft with deformable sheet-form material | Umesh H. Patel, F. Joseph Obermiller, Clay Fette | 2018-05-01 |
| 9832853 | Alignment of light source focus | William N. Partlo, Steven Chang, Robert A. Bergstedt | 2017-11-28 |
| 9795023 | Apparatus for and method of source material delivery in a laser produced plasma EUV light source | Alexander I. Ershov, David Robert Evans | 2017-10-17 |
| D800221 | Portable sign | — | 2017-10-17 |
| D800222 | Portable sign | — | 2017-10-17 |
| 9755396 | EUV LPP source with improved dose control by combining pulse modulation and pulse control mode | Paul Frihauf, Andrew Liu, Spencer Rich, Steven Chang, Wayne J. Dunstan +1 more | 2017-09-05 |
| 9687215 | Volumetric grafts for treatment of fistulae and related methods and systems | F. Joseph Obermiller, Michael C. Hiles, Clay Fette | 2017-06-27 |
| 9588430 | System and method to adaptively pre-compensate for target material push-out to optimize extreme ultraviolet light production | Jeroen van der Burgt, Charles E. Kinney, Wayne J. Dunstan | 2017-03-07 |
| 9572556 | Volumetric grafts for treatment of fistulae and related methods and systems | F. Joseph Obermiller, Michael C. Hiles, Clay Fette | 2017-02-21 |
| 9456813 | Volumetric grafts for treatment of fistulae and related methods and systems | F. Joseph Obermiller, Michael C. Hiles, Clay Fette | 2016-10-04 |
| 9363877 | System and method to reduce oscillations in extreme ultraviolet light generation | — | 2016-06-07 |
| 9301382 | Apparatus for and method of source material delivery in a laser produced plasma EUV light source | Alexander I. Ershov, David Robert Evans | 2016-03-29 |
| 9238243 | System and method to adaptively pre-compensate for target material push-out to optimize extreme ultraviolet light production | Jeroen van der Burgt, Charles E. Kinney, Wayne J. Dunstan | 2016-01-19 |
| 9226736 | Volumetric grafts for treatment of fistulae and related methods and systems | F. Joseph Obermiller, Michael C. Hiles, Clay Fette | 2016-01-05 |
| 9127981 | System and method for return beam metrology with optical switch | Robert A. Bergstedt, Steven Chang | 2015-09-08 |
| 9000403 | System and method for adjusting seed laser pulse width to control EUV output energy | James H. Crouch, Robert Jay Rafac, Daniel Jason Riggs | 2015-04-07 |
| 8993976 | Energy sensors for light beam alignment | Steven Chang, Jim Crouch, Igor V. Fomenkov | 2015-03-31 |
| 8872122 | Method of timing laser beam pulses to regulate extreme ultraviolet light dosing | Alexander Anthony Schafgans, James H. Crouch, Steven Chang, Paul Frihauf, Andrew Liu +1 more | 2014-10-28 |