Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12085862 | Laser system for source material conditioning in an EUV light source | Matthew R. Graham, Sean W. McGrogan | 2024-09-10 |
| 9755396 | EUV LPP source with improved dose control by combining pulse modulation and pulse control mode | Paul Frihauf, Andrew Liu, Matthew R. Graham, Steven Chang, Wayne J. Dunstan +1 more | 2017-09-05 |