Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9755396 | EUV LPP source with improved dose control by combining pulse modulation and pulse control mode | Paul Frihauf, Andrew Liu, Spencer Rich, Matthew R. Graham, Steven Chang +1 more | 2017-09-05 |
| 9588430 | System and method to adaptively pre-compensate for target material push-out to optimize extreme ultraviolet light production | Jeroen van der Burgt, Matthew R. Graham, Charles E. Kinney | 2017-03-07 |
| 9238243 | System and method to adaptively pre-compensate for target material push-out to optimize extreme ultraviolet light production | Jeroen van der Burgt, Matthew R. Graham, Charles E. Kinney | 2016-01-19 |
| 8872122 | Method of timing laser beam pulses to regulate extreme ultraviolet light dosing | Alexander Anthony Schafgans, James H. Crouch, Matthew R. Graham, Steven Chang, Paul Frihauf +1 more | 2014-10-28 |
| 8598552 | System and method to optimize extreme ultraviolet light generation | Paul Frihauf, Daniel Jason Riggs, Matthew R. Graham, Steven Chang | 2013-12-03 |
| 8098698 | Active spectral control of DUV laser light source | Robert N. Jacques | 2012-01-17 |
| 7852889 | Active spectral control of DUV light source | Robert N. Jacques, Rajasekhar Rao, Fedor Trintchouk | 2010-12-14 |
| 7835414 | Laser gas injection system | Kevin M. O'Brien, Robert N. Jacques, Herve A. Besaucele, Aravind Ratnam | 2010-11-16 |
| 7830942 | Ultraviolet laser light source pulse energy control system | Robert N. Jacques | 2010-11-09 |
| 7741639 | Multi-chambered excimer or molecular fluorine gas discharge laser fluorine injection control | Herve A. Besaucele, Toshihiko Ishihara, Robert N. Jacques, Fedor Trintchouk | 2010-06-22 |