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EUV LPP source with improved dose control by combining pulse modulation and pulse control mode |
Paul Frihauf, Andrew Liu, Spencer Rich, Matthew R. Graham, Steven Chang +1 more |
2017-09-05 |
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System and method to adaptively pre-compensate for target material push-out to optimize extreme ultraviolet light production |
Jeroen van der Burgt, Matthew R. Graham, Charles E. Kinney |
2017-03-07 |
| 9238243 |
System and method to adaptively pre-compensate for target material push-out to optimize extreme ultraviolet light production |
Jeroen van der Burgt, Matthew R. Graham, Charles E. Kinney |
2016-01-19 |
| 8872122 |
Method of timing laser beam pulses to regulate extreme ultraviolet light dosing |
Alexander Anthony Schafgans, James H. Crouch, Matthew R. Graham, Steven Chang, Paul Frihauf +1 more |
2014-10-28 |
| 8598552 |
System and method to optimize extreme ultraviolet light generation |
Paul Frihauf, Daniel Jason Riggs, Matthew R. Graham, Steven Chang |
2013-12-03 |
| 8098698 |
Active spectral control of DUV laser light source |
Robert N. Jacques |
2012-01-17 |
| 7852889 |
Active spectral control of DUV light source |
Robert N. Jacques, Rajasekhar Rao, Fedor Trintchouk |
2010-12-14 |
| 7835414 |
Laser gas injection system |
Kevin M. O'Brien, Robert N. Jacques, Herve A. Besaucele, Aravind Ratnam |
2010-11-16 |
| 7830942 |
Ultraviolet laser light source pulse energy control system |
Robert N. Jacques |
2010-11-09 |
| 7741639 |
Multi-chambered excimer or molecular fluorine gas discharge laser fluorine injection control |
Herve A. Besaucele, Toshihiko Ishihara, Robert N. Jacques, Fedor Trintchouk |
2010-06-22 |