Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763070 | Low pressure wire ion plasma discharge source, and application to electron source with secondary emission | Paul Ceccato | 2020-09-01 |
| 9779945 | Method and apparatus for irradiating a semiconductor material surface by laser energy | Bruno Godard, Cyril Dutems | 2017-10-03 |
| 7835414 | Laser gas injection system | Wayne J. Dunstan, Kevin M. O'Brien, Robert N. Jacques, Aravind Ratnam | 2010-11-16 |
| 7741639 | Multi-chambered excimer or molecular fluorine gas discharge laser fluorine injection control | Wayne J. Dunstan, Toshihiko Ishihara, Robert N. Jacques, Fedor Trintchouk | 2010-06-22 |
| 7567607 | Very narrow band, two chamber, high rep-rate gas discharge laser system | David S. Knowles, Daniel J. W. Brown, David W. Myers, Alexander I. Ershov, William N. Partlo +10 more | 2009-07-28 |
| 7471708 | Gas discharge laser output light beam parameter control | Igor V. Fomenkov, William N. Partlo, Fedor Trintchouk, Hao Ton That | 2008-12-30 |
| 7218661 | Line selected F2 two chamber laser system | David S. Knowles, Daniel J. W. Brown, Richard L. Sandstrom, German E. Rylov, Eckehard D. Onkels +8 more | 2007-05-15 |
| 7061961 | Very narrow band, two chamber, high rep-rate gas discharge laser system | David S. Knowles, Daniel J. W. Brown, David W. Myers, Alexander I. Ershov, William N. Partlo +10 more | 2006-06-13 |
| 7058107 | Line selected F2 two chamber laser system | David S. Knowles, Daniel J. W. Brown, Richard L. Sandstrom, German E. Rylov, Eckehard D. Onkels +8 more | 2006-06-06 |
| 6985508 | Very narrow band, two chamber, high reprate gas discharge laser system | David S. Knowles, Daniel J. W. Brown, David W. Meyers, Alexander I. Ershov, William N. Partlo +10 more | 2006-01-10 |
| 6801560 | Line selected F2 two chamber laser system | David S. Knowles, Daniel J. W. Brown, Richard L. Sandstrom, German E. Rylov, Eckehard D. Onkels +8 more | 2004-10-05 |
| 6704339 | Lithography laser with beam delivery and beam pointing control | Leonard Lublin, David J. Warkentin, Palash P. Das, Brian Klene, R. Kyle Webb +4 more | 2004-03-09 |
| 6625191 | Very narrow band, two chamber, high rep rate gas discharge laser system | David S. Knowles, Daniel J. W. Brown, David W. Myers, Alexander I. Ershov, William N. Partlo +10 more | 2003-09-23 |
| 6567450 | Very narrow band, two chamber, high rep rate gas discharge laser system | David W. Myers, Alexander I. Ershov, William N. Partlo, Richard L. Sandstrom, Palash P. Das +7 more | 2003-05-20 |
| 6553049 | ArF laser with low pulse energy and high rep rate | Jean-Marc Hueber, Alexander I. Ershov, Thomas Hofmann, Vladimir B. Fleurov | 2003-04-22 |
| RE38054 | Reliable, modular, production quality narrow-band high rep rate F2 laser | Thomas Hofmann, Jean-Marc Hueber, Palash P. Das, Toshihiko Ishihara, Thomas Patrick Duffey +7 more | 2003-04-01 |
| 6330261 | Reliable, modular, production quality narrow-band high rep rate ArF excimer laser | Toshihiko Ishihara, Thomas Patrick Duffey, John T. Melchior, Richard G. Morton, Richard M. Ness +4 more | 2001-12-11 |
| 6188710 | Narrow band gas discharge laser with gas additive | Toshihiko Ishihara, Thomas Hofmann | 2001-02-13 |
| 6128323 | Reliable modular production quality narrow-band high REP rate excimer laser | David W. Myers, Palash P. Das, Thomas Patrick Duffey, Alexander I. Ershov, Igor V. Fomenkov +14 more | 2000-10-03 |
| 6067306 | Laser-illuminated stepper or scanner with energy sensor feedback | Richard L. Sandstrom, Palash P. Das, Igor V. Fomenkov, Robert G. Ozarski | 2000-05-23 |
| 6018537 | Reliable, modular, production quality narrow-band high rep rate F.sub.2 laser | Thomas Hofmann, Jean-Marc Hueber, Palash P. Das, Toshihiko Ishihara, Thomas Patrick Duffey +7 more | 2000-01-25 |
| 6005879 | Pulse energy control for excimer laser | Richard L. Sandstrom, Igor V. Fomenkov, Palash P. Das | 1999-12-21 |
| 5991324 | Reliable. modular, production quality narrow-band KRF excimer laser | David S. Knowles, James H. Azzola, Palash P. Das, Alexander I. Ershov, Igor V. Fomenkov +8 more | 1999-11-23 |
| 5978405 | Laser chamber with minimized acoustic and shock wave disturbances | Tibor Juhasz, Richard C. Ujazdowski, Robert G. Ozarski, James H. Azzola | 1999-11-02 |