Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6212211 | Shock wave dissipating laser chamber | Paul R. Marsden, Richard C. Ujazdowski | 2001-04-03 |
| 6034978 | Gas discharge laser with gas temperature control | Richard C. Ujazdowski, Robert A. Shannon, Dmitry Berger, William N. Partlo, Tom A. Watson +9 more | 2000-03-07 |
| 5991324 | Reliable. modular, production quality narrow-band KRF excimer laser | David S. Knowles, Herve A. Besaucele, Palash P. Das, Alexander I. Ershov, Igor V. Fomenkov +8 more | 1999-11-23 |
| 5978405 | Laser chamber with minimized acoustic and shock wave disturbances | Tibor Juhasz, Richard C. Ujazdowski, Herve A. Besaucele, Robert G. Ozarski | 1999-11-02 |