| 8443787 |
Method for fuel vapor canister purging |
Steven Yellin Schondorf |
2013-05-21 |
$25,667,000 |
| 8104454 |
Method for fuel vapor canister purging |
Steven Yellin Schondorf |
2012-01-31 |
$17,796,000 |
| 7775195 |
Method for fuel vapor canister purging |
Steven Yellin Schondorf |
2010-08-17 |
$30,012,000 |
| 7346093 |
DUV light source optical element improvements |
Richard L. Sandstrom, John M. Algots, Joshua Brown, Raymond F. Cybulski, John Dunlop +6 more |
2008-03-18 |
$6,813,000 |
| 7277464 |
Method and apparatus for controlling the output of a gas discharge laser system |
John Allen Rule, Paolo Zambon, Omez S. Mesina, Weijie ZHENG |
2007-10-02 |
$3,345,000 |
| 7203562 |
Process monitoring system for lithography lasers |
Parthiv Patel, Joseph Conway, Muljadi Tantra, Jeffrey W. Moen, Jason R. Carlesi +2 more |
2007-04-10 |
$5,116,000 |
| 7132123 |
High rep-rate laser with improved electrodes |
Richard G. Morton, Timothy Dyer, Thomas D. Steiger, Richard C. Ujazdowski, Bryan Moosman +3 more |
2006-11-07 |
$14,774,000 |
| 6937635 |
High rep-rate laser with improved electrodes |
Richard G. Morton, Timothy Dyer, Thomas D. Steiger, Richard C. Ujazdowski, Bryan Moosman +3 more |
2005-08-30 |
$11,076,000 |
| 6914919 |
Six to ten KHz, or greater gas discharge laser system |
Richard C. Ujazdowski, Alex P. Ivaschenko, Richard L. Sandstrom, Robert A. Shannon, R. Kyle Webb +6 more |
2005-07-05 |
$4,793,000 |
| 6914927 |
Laser discharge chamber passivation by plasma |
Richard L. Sandstrom, Richard G. Morton, Robert E. Weeks, John Quitter, Mark R. Lewis |
2005-07-05 |
$4,793,000 |
| 6690706 |
High rep-rate laser with improved electrodes |
Richard G. Morton, Timothy Dyer, Thomas D. Steiger, Richard C. Ujazdowski, Bryan Moosman +1 more |
2004-02-10 |
$7,742,000 |
| 6687562 |
Process monitoring system for lithography lasers |
Parthiv Patel, Joseph Conway, Muljadi Tantra, Jeffrey W. Moen, Jason R. Carlesi +2 more |
2004-02-03 |
$15,701,000 |
| 6644324 |
Laser discharge chamber passivation by plasma |
Richard L. Sandstrom, Richard G. Morton, Robert E. Weeks, John Quitter, Mark R. Lewis |
2003-11-11 |
$19,727,000 |
| 6408260 |
Laser lithography quality alarm system |
Michael Watts |
2002-06-18 |
$17,231,000 |
| 6392743 |
Control technique for microlithography lasers |
Paolo Zambon, Gamaralalage G. Padmabandu, Palash P. Das |
2002-05-21 |
$21,407,000 |
| 6320892 |
Energy efficient lithography laser |
Gamaralalage G. Padmabandu, Palash P. Das, Paolo Zambon |
2001-11-20 |
$5,813,000 |
| 6318039 |
Cornice or crown molding finishing accessory |
Scott P. Thompson |
2001-11-20 |
|
| 6240117 |
Fluorine control system with fluorine monitor |
Mengxiong Gong, Palash P. Das, Richard L. Sandstrom, Thomas Patrick Duffey |
2001-05-29 |
$6,001,000 |
| 6163559 |
Beam expander for ultraviolet lasers |
— |
2000-12-19 |
$7,479,000 |
| 6144686 |
Tangential fan with cutoff assembly and vibration control for electric discharge laser |
Thomas Hofmann, James K. Howey, Robert A. Shannon, Richard C. Ujazdowski, R. Kyle Webb |
2000-11-07 |
$12,799,000 |
| 6128323 |
Reliable modular production quality narrow-band high REP rate excimer laser |
David W. Myers, Herve A. Besaucele, Palash P. Das, Thomas Patrick Duffey, Alexander I. Ershov +14 more |
2000-10-03 |
$13,925,000 |
| 6034984 |
Tangential fan with cutoff assembly and vibration control for electric discharge laser |
Thomas Hofmann, James K. Howey, Robert A. Shannon, Richard C. Ujazdowski, R. Kyle Webb |
2000-03-07 |
$13,978,000 |
| 6034978 |
Gas discharge laser with gas temperature control |
Richard C. Ujazdowski, Robert A. Shannon, Dmitry Berger, William N. Partlo, Paul St. Mark Shadforth Thompson +9 more |
2000-03-07 |
$13,978,000 |
| 6028880 |
Automatic fluorine control system |
Jason R. Carlesi, Shahryar Rokni, Mengxiong Gong, Palash P. Das, Michael C. Binder +3 more |
2000-02-22 |
$8,451,000 |
| 5991324 |
Reliable. modular, production quality narrow-band KRF excimer laser |
David S. Knowles, James H. Azzola, Herve A. Besaucele, Palash P. Das, Alexander I. Ershov +8 more |
1999-11-23 |
$21,131,000 |
