Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7203562 | Process monitoring system for lithography lasers | Parthiv Patel, Joseph Conway, Jeffrey W. Moen, Jason R. Carlesi, Roger Green +2 more | 2007-04-10 |
| 6687562 | Process monitoring system for lithography lasers | Parthiv Patel, Joseph Conway, Jeffrey W. Moen, Jason R. Carlesi, Roger Green +2 more | 2004-02-03 |
| 6028880 | Automatic fluorine control system | Jason R. Carlesi, Shahryar Rokni, Mengxiong Gong, Tom A. Watson, Palash P. Das +3 more | 2000-02-22 |