Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7203562 | Process monitoring system for lithography lasers | Parthiv Patel, Joseph Conway, Muljadi Tantra, Jeffrey W. Moen, Roger Green +2 more | 2007-04-10 |
| 6687562 | Process monitoring system for lithography lasers | Parthiv Patel, Joseph Conway, Muljadi Tantra, Jeffrey W. Moen, Roger Green +2 more | 2004-02-03 |
| 6618425 | Virtual laser operator | David J. Dunlap, Igor V. Fomenkov | 2003-09-09 |
| 6151349 | Automatic fluorine control system | Mengxiong Gong, Michael C. Binder, Palash P. Das | 2000-11-21 |
| 6028880 | Automatic fluorine control system | Shahryar Rokni, Mengxiong Gong, Tom A. Watson, Palash P. Das, Michael C. Binder +3 more | 2000-02-22 |