Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6882674 | Four KHz gas discharge laser system | Christian J. Wittak, William N. Partlo, Richard L. Sandstrom, Paul C. Melcher, David M. Johns +19 more | 2005-04-19 |
| 6757316 | Four KHz gas discharge laser | Peter Clarke Newman, Thomas Patrick Duffey, William N. Partlo, Richard L. Sandstrom, Paul C. Melcher +14 more | 2004-06-29 |
| 6704339 | Lithography laser with beam delivery and beam pointing control | Leonard Lublin, David J. Warkentin, Palash P. Das, Brian Klene, R. Kyle Webb +4 more | 2004-03-09 |
| 6539042 | Ultra pure component purge system for gas discharge laser | Xiaojiang Pan, Eckehard D. Onkels | 2003-03-25 |
| 6504860 | Purge monitoring system for gas discharge laser | Peter Clarke Newman, John Van Doorn, Darrel W. Fullen, William H. Clopton | 2003-01-07 |
| 6028880 | Automatic fluorine control system | Jason R. Carlesi, Mengxiong Gong, Tom A. Watson, Palash P. Das, Michael C. Binder +3 more | 2000-02-22 |
| 5978406 | Fluorine control system for excimer lasers | Tom A. Watson, David J. Tammadge | 1999-11-02 |