Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10951307 | Window heater with reduced wavefront distortion | Siegfried Fleischer | 2021-03-16 |
| 10079640 | Window heater with reduced wavefront distortion | Siegfried Fleischer | 2018-09-18 |
| 9544052 | Simple low cost tip-tilt wavefront sensor having extended dynamic range | Malcolm J. Northcott, J. Elon Graves, Siegfried Fleischer, Jeffrey Tuttle, Yu-Chun Chang | 2017-01-10 |
| 8691598 | Dual-loop control for laser annealing of semiconductor wafers | James T. McWhirter, David Gaines, Joseph Y. Lee | 2014-04-08 |
| 7277464 | Method and apparatus for controlling the output of a gas discharge laser system | John Allen Rule, Tom A. Watson, Omez S. Mesina, Weijie ZHENG | 2007-10-02 |
| 7209507 | Method and apparatus for controlling the output of a gas discharge MOPA laser system | John Allen Rule | 2007-04-24 |
| 6882674 | Four KHz gas discharge laser system | Christian J. Wittak, William N. Partlo, Richard L. Sandstrom, Paul C. Melcher, David M. Johns +19 more | 2005-04-19 |
| 6392743 | Control technique for microlithography lasers | Gamaralalage G. Padmabandu, Tom A. Watson, Palash P. Das | 2002-05-21 |
| 6320892 | Energy efficient lithography laser | Gamaralalage G. Padmabandu, Palash P. Das, Tom A. Watson | 2001-11-20 |
| 6128323 | Reliable modular production quality narrow-band high REP rate excimer laser | David W. Myers, Herve A. Besaucele, Palash P. Das, Thomas Patrick Duffey, Alexander I. Ershov +14 more | 2000-10-03 |