Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9613828 | Method of laser annealing a semiconductor wafer with localized control of ambient oxygen | Arthur W. Zafiropoulo | 2017-04-04 |
| 9559023 | Systems and methods for reducing beam instability in laser annealing | Andrew M. Hawryluk, Serguei Anikitichev, Masoud Safa | 2017-01-31 |
| 9475150 | Dual-loop control for laser annealing of semiconductor wafers | David Gaines, Joseph Y. Lee, Paulo Zambon | 2016-10-25 |
| 9029809 | Movable microchamber system with gas curtain | Digby Pun, Ali Shajii, Andrew Cowe, Raymond Ellis | 2015-05-12 |
| 8822353 | Systems and methods for forming a time-averaged line image | Serguei Anikitchev, Joseph E. Gortych | 2014-09-02 |
| 8691598 | Dual-loop control for laser annealing of semiconductor wafers | David Gaines, Joseph Y. Lee, Paolo Zambon | 2014-04-08 |
| 8399808 | Systems and methods for forming a time-averaged line image | Serguei Anikitchev, Joseph E. Gortych | 2013-03-19 |
| 8026519 | Systems and methods for forming a time-averaged line image | Serguei Anikitchev, Joseph E. Gortych | 2011-09-27 |
| 7190441 | Methods and systems for preparing a sample for thin film analysis | Liang Wang, Hidong Kwak, Haixing Zou, Dan G. Georgesco, Bernard Lautee +3 more | 2007-03-13 |