| 12159765 |
Method and apparatus for plasma generation |
Ron Collins, Gordon Hill |
2024-12-03 |
| 11854839 |
Valve apparatuses and related methods for reactive process gas isolation and facilitating purge during isolation |
Gordon Hill |
2023-12-26 |
| 11664197 |
Method and apparatus for plasma generation |
Gordon Hill, Ron Collins, Larry Bourget |
2023-05-30 |
| 10424460 |
Systems, methods and apparatus for choked flow element extraction |
Ali Shajii, Richard A. Gottscho, Souheil Benzerrouk, Siddharth P. Nagarkatti, William Robert Entley |
2019-09-24 |
| 10283325 |
Distributed multi-zone plasma source systems, methods and apparatus |
Ali Shajii, Richard A. Gottscho, Souheil Benzerrouk, Siddharth P. Nagarkatti, William Robert Entley |
2019-05-07 |
| 9967965 |
Distributed, concentric multi-zone plasma source systems, methods and apparatus |
Ali Shajii, Richard A. Gottscho, Souheil Benzerrouk, Siddharth P. Nagarkatti, William Robert Entley |
2018-05-08 |
| 9449793 |
Systems, methods and apparatus for choked flow element extraction |
Ali Shajii, Richard A. Gottscho, Souheil Benzerrouk, Siddharth P. Nagarkatti, William Robert Entley |
2016-09-20 |
| 9275839 |
Toroidal plasma chamber for high gas flow rate process |
Xing Chen |
2016-03-01 |
| 9155181 |
Distributed multi-zone plasma source systems, methods and apparatus |
Ali Shajii, Richard A. Gottscho, Souheil Benzerrouk, Siddharth P. Nagarkatti, William Robert Entley |
2015-10-06 |
| 9070538 |
Pinched plasma bridge flood gun for substrate charge neutralization |
Ali Shajii, David Sonnenshein, Michael Kishinevsky, Gregory Edward Stratoti |
2015-06-30 |
| 9029809 |
Movable microchamber system with gas curtain |
Digby Pun, Ali Shajii, Raymond Ellis, James T. McWhirter |
2015-05-12 |
| 8999104 |
Systems, methods and apparatus for separate plasma source control |
Ali Shajii, Richard A. Gottscho, Souheil Benzerrouk, Siddharth P. Nagarkatti, William Robert Entley |
2015-04-07 |
| 8692466 |
Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator |
Souheil Benzerrouk, Siddharth P. Nagarkatti, Ali Shajii, Jesse E. Ambrosina, Ken Tran +1 more |
2014-04-08 |
| 7914603 |
Particle trap for a plasma source |
Ali Shajii, Xing Chen, David M. Burtner, William Robert Entley, ShouQian Shao |
2011-03-29 |
| 7659489 |
Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel |
William M. Holber, Xing Chen, Matthew Besen, Ronald W. Collins, Jr., Susan C. Trulli +1 more |
2010-02-09 |
| 7501600 |
Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel |
William M. Holber, Xing Chen, Matthew Besen, Ronald W. Collins, Jr., Susan C. Trulli +1 more |
2009-03-10 |
| 7166816 |
Inductively-coupled torodial plasma source |
Xing Chen, William M. Holber, Eric Georgelis, Ilya M. Bystyak, Andrzej Bortkiewicz |
2007-01-23 |
| 6872909 |
Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel |
William M. Holber, Xing Chen, Matthew Besen, Ronald W. Collins, Jr., Susan C. Trulli +1 more |
2005-03-29 |
| 6815633 |
Inductively-coupled toroidal plasma source |
Xing Chen, William M. Holber, Eric Georgelis, Ilya M. Bystyak, Andrzej Bortkiewicz |
2004-11-09 |
