Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12159765 | Method and apparatus for plasma generation | Ron Collins, Gordon Hill | 2024-12-03 |
| 11854839 | Valve apparatuses and related methods for reactive process gas isolation and facilitating purge during isolation | Gordon Hill | 2023-12-26 |
| 11664197 | Method and apparatus for plasma generation | Gordon Hill, Ron Collins, Larry Bourget | 2023-05-30 |
| 10424460 | Systems, methods and apparatus for choked flow element extraction | Ali Shajii, Richard A. Gottscho, Souheil Benzerrouk, Siddharth P. Nagarkatti, William Robert Entley | 2019-09-24 |
| 10283325 | Distributed multi-zone plasma source systems, methods and apparatus | Ali Shajii, Richard A. Gottscho, Souheil Benzerrouk, Siddharth P. Nagarkatti, William Robert Entley | 2019-05-07 |
| 9967965 | Distributed, concentric multi-zone plasma source systems, methods and apparatus | Ali Shajii, Richard A. Gottscho, Souheil Benzerrouk, Siddharth P. Nagarkatti, William Robert Entley | 2018-05-08 |
| 9449793 | Systems, methods and apparatus for choked flow element extraction | Ali Shajii, Richard A. Gottscho, Souheil Benzerrouk, Siddharth P. Nagarkatti, William Robert Entley | 2016-09-20 |
| 9275839 | Toroidal plasma chamber for high gas flow rate process | Xing Chen | 2016-03-01 |
| 9155181 | Distributed multi-zone plasma source systems, methods and apparatus | Ali Shajii, Richard A. Gottscho, Souheil Benzerrouk, Siddharth P. Nagarkatti, William Robert Entley | 2015-10-06 |
| 9070538 | Pinched plasma bridge flood gun for substrate charge neutralization | Ali Shajii, David Sonnenshein, Michael Kishinevsky, Gregory Edward Stratoti | 2015-06-30 |
| 9029809 | Movable microchamber system with gas curtain | Digby Pun, Ali Shajii, Raymond Ellis, James T. McWhirter | 2015-05-12 |
| 8999104 | Systems, methods and apparatus for separate plasma source control | Ali Shajii, Richard A. Gottscho, Souheil Benzerrouk, Siddharth P. Nagarkatti, William Robert Entley | 2015-04-07 |
| 8692466 | Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator | Souheil Benzerrouk, Siddharth P. Nagarkatti, Ali Shajii, Jesse E. Ambrosina, Ken Tran +1 more | 2014-04-08 |
| 7914603 | Particle trap for a plasma source | Ali Shajii, Xing Chen, David M. Burtner, William Robert Entley, ShouQian Shao | 2011-03-29 |
| 7659489 | Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel | William M. Holber, Xing Chen, Matthew Besen, Ronald W. Collins, Jr., Susan C. Trulli +1 more | 2010-02-09 |
| 7501600 | Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel | William M. Holber, Xing Chen, Matthew Besen, Ronald W. Collins, Jr., Susan C. Trulli +1 more | 2009-03-10 |
| 7166816 | Inductively-coupled torodial plasma source | Xing Chen, William M. Holber, Eric Georgelis, Ilya M. Bystyak, Andrzej Bortkiewicz | 2007-01-23 |
| 6872909 | Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel | William M. Holber, Xing Chen, Matthew Besen, Ronald W. Collins, Jr., Susan C. Trulli +1 more | 2005-03-29 |
| 6815633 | Inductively-coupled toroidal plasma source | Xing Chen, William M. Holber, Eric Georgelis, Ilya M. Bystyak, Andrzej Bortkiewicz | 2004-11-09 |