Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7541558 | Inductively-coupled toroidal plasma source | Donald K. Smith, Xing Chen, William M. Holber | 2009-06-02 |
| 7166816 | Inductively-coupled torodial plasma source | Xing Chen, William M. Holber, Andrew Cowe, Ilya M. Bystyak, Andrzej Bortkiewicz | 2007-01-23 |
| 7161112 | Toroidal low-field reactive gas source | Donald K. Smith, Xing Chen, William M. Holber | 2007-01-09 |
| 6815633 | Inductively-coupled toroidal plasma source | Xing Chen, William M. Holber, Andrew Cowe, Ilya M. Bystyak, Andrzej Bortkiewicz | 2004-11-09 |
| 6664497 | Toroidal low-field reactive gas source | Donald K. Smith, Xing Chen, William M. Holber | 2003-12-16 |
| 6559408 | Toroidal low-field reactive gas source | Donald K. Smith, Xing Chen, William M. Holber | 2003-05-06 |
| 6552296 | Toroidal low-field reactive gas source | Donald K. Smith, Xing Chen, William M. Holber | 2003-04-22 |
| 6486431 | Toroidal low-field reactive gas source | Donald K. Smith, Xing Chen, William M. Holber | 2002-11-26 |
| 6388226 | Toroidal low-field reactive gas source | Donald K. Smith, Xing Chen, William M. Holber | 2002-05-14 |
| 6150628 | Toroidal low-field reactive gas source | Donald K. Smith, Xing Chen, William M. Holber | 2000-11-21 |
| 5625259 | Microwave plasma applicator with a helical fluid cooling channel surrounding a microwave transparent discharge tube | William M. Holber, Donald K. Smith, Matthew Besen, Matthew P. Fitzner | 1997-04-29 |
| 5568015 | Fluid-cooled dielectric window for a plasma system | William M. Holber, Donald K. Smith, Matthew Besen, Matthew P. Fitzner | 1996-10-22 |