EG

Eric Georgelis

AT Applied Science & Technology: 9 patents #3 of 33Top 10%
MI Mks Instruments: 3 patents #112 of 442Top 30%
Overall (All Time): #425,058 of 4,157,543Top 15%
12
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
7541558 Inductively-coupled toroidal plasma source Donald K. Smith, Xing Chen, William M. Holber 2009-06-02
7166816 Inductively-coupled torodial plasma source Xing Chen, William M. Holber, Andrew Cowe, Ilya M. Bystyak, Andrzej Bortkiewicz 2007-01-23
7161112 Toroidal low-field reactive gas source Donald K. Smith, Xing Chen, William M. Holber 2007-01-09
6815633 Inductively-coupled toroidal plasma source Xing Chen, William M. Holber, Andrew Cowe, Ilya M. Bystyak, Andrzej Bortkiewicz 2004-11-09
6664497 Toroidal low-field reactive gas source Donald K. Smith, Xing Chen, William M. Holber 2003-12-16
6559408 Toroidal low-field reactive gas source Donald K. Smith, Xing Chen, William M. Holber 2003-05-06
6552296 Toroidal low-field reactive gas source Donald K. Smith, Xing Chen, William M. Holber 2003-04-22
6486431 Toroidal low-field reactive gas source Donald K. Smith, Xing Chen, William M. Holber 2002-11-26
6388226 Toroidal low-field reactive gas source Donald K. Smith, Xing Chen, William M. Holber 2002-05-14
6150628 Toroidal low-field reactive gas source Donald K. Smith, Xing Chen, William M. Holber 2000-11-21
5625259 Microwave plasma applicator with a helical fluid cooling channel surrounding a microwave transparent discharge tube William M. Holber, Donald K. Smith, Matthew Besen, Matthew P. Fitzner 1997-04-29
5568015 Fluid-cooled dielectric window for a plasma system William M. Holber, Donald K. Smith, Matthew Besen, Matthew P. Fitzner 1996-10-22