| 7541558 |
Inductively-coupled toroidal plasma source |
Donald K. Smith, Xing Chen, William M. Holber |
2009-06-02 |
| 7166816 |
Inductively-coupled torodial plasma source |
Xing Chen, William M. Holber, Andrew Cowe, Ilya M. Bystyak, Andrzej Bortkiewicz |
2007-01-23 |
| 7161112 |
Toroidal low-field reactive gas source |
Donald K. Smith, Xing Chen, William M. Holber |
2007-01-09 |
| 6815633 |
Inductively-coupled toroidal plasma source |
Xing Chen, William M. Holber, Andrew Cowe, Ilya M. Bystyak, Andrzej Bortkiewicz |
2004-11-09 |
| 6664497 |
Toroidal low-field reactive gas source |
Donald K. Smith, Xing Chen, William M. Holber |
2003-12-16 |
| 6559408 |
Toroidal low-field reactive gas source |
Donald K. Smith, Xing Chen, William M. Holber |
2003-05-06 |
| 6552296 |
Toroidal low-field reactive gas source |
Donald K. Smith, Xing Chen, William M. Holber |
2003-04-22 |
| 6486431 |
Toroidal low-field reactive gas source |
Donald K. Smith, Xing Chen, William M. Holber |
2002-11-26 |
| 6388226 |
Toroidal low-field reactive gas source |
Donald K. Smith, Xing Chen, William M. Holber |
2002-05-14 |
| 6150628 |
Toroidal low-field reactive gas source |
Donald K. Smith, Xing Chen, William M. Holber |
2000-11-21 |
| 5625259 |
Microwave plasma applicator with a helical fluid cooling channel surrounding a microwave transparent discharge tube |
William M. Holber, Donald K. Smith, Matthew Besen, Matthew P. Fitzner |
1997-04-29 |
| 5568015 |
Fluid-cooled dielectric window for a plasma system |
William M. Holber, Donald K. Smith, Matthew Besen, Matthew P. Fitzner |
1996-10-22 |