Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7166816 | Inductively-coupled torodial plasma source | Xing Chen, William M. Holber, Andrew Cowe, Eric Georgelis, Andrzej Bortkiewicz | 2007-01-23 |
| 6815633 | Inductively-coupled toroidal plasma source | Xing Chen, William M. Holber, Andrew Cowe, Eric Georgelis, Andrzej Bortkiewicz | 2004-11-09 |