Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9613828 | Method of laser annealing a semiconductor wafer with localized control of ambient oxygen | James T. McWhirter | 2017-04-04 |
| 9583337 | Oxygen radical enhanced atomic-layer deposition using ozone plasma | — | 2017-02-28 |
| 9318319 | Radical-enhanced atomic layer deposition using CF4 to enhance oxygen radical generation | Mark Sowa | 2016-04-19 |
| 9266437 | Betavoltaic power sources for transportation applications | Andrew M. Hawryluk | 2016-02-23 |
| 8986562 | Methods of laser processing photoresist in a gaseous environment | Andrew M. Hawryluk | 2015-03-24 |
| 8872408 | Betavoltaic power sources for mobile device applications | Andrew M. Hawryluk | 2014-10-28 |
| 8796151 | Systems for and methods of laser-enhanced plasma processing of semiconductor materials | Andrew M. Hawryluk | 2014-08-05 |
| 8501638 | Laser annealing scanning methods with reduced annealing non-uniformities | — | 2013-08-06 |
| 8067305 | Electrically conductive structure on a semiconductor substrate formed from printing | Andrew M. Hawryluk | 2011-11-29 |
| 6776846 | Integrated processing system having multiple reactors connected to a central chamber | Joseph A. Maher, E. John Vowles, Joseph D. Napoli, Mark William Miller | 2004-08-17 |
| 6413320 | Integrated processing system having multiple reactors connected to a central chamber | Joseph A. Maher, E. John Vowles, Joseph D. Napoli, Mark William Miller | 2002-07-02 |
| 6214119 | Vacuum substrate processing system having multiple processing chambers and a central load/unload chamber | Joseph A. Maher, E. John Vowles, Joseph D. Napoli, Mark William Miller | 2001-04-10 |
| 6103055 | System for processing substrates | Joseph A. Maher, E. John Vowles, Joseph D. Napoli, Mark William Miller | 2000-08-15 |
| 5344542 | Multiple-processing and contamination-free plasma etching system | Joseph A. Maher, E. John Vowles, Joseph D. Napoli, Mark William Miller | 1994-09-06 |
| 5308431 | System providing multiple processing of substrates | Joseph A. Maher, E. John Vowles, Joseph D. Napoli, Mark William Miller | 1994-05-03 |
| 5102495 | Method providing multiple-processing of substrates | Joseph A. Maher, E. John Vowles, Joseph D. Napoli, Mark William Miller | 1992-04-07 |
| 5013385 | Quad processor | Joseph A. Maher, E. John Vowles, Joseph D. Napoli, Mark William Miller | 1991-05-07 |
| 4715921 | Quad processor | Joseph A. Maher, E. John Vowles, Joseph D. Napoli, Mark William Miller | 1987-12-29 |
| 4473435 | Plasma etchant mixture | Joseph Anthony Mayer, II | 1984-09-25 |
| D275032 | Plasma cassette etcher | Joseph A. Maher | 1984-08-07 |
| 4381965 | Multi-planar electrode plasma etching | Joseph A. Maher | 1983-05-03 |