Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6776846 | Integrated processing system having multiple reactors connected to a central chamber | Joseph A. Maher, Joseph D. Napoli, Arthur W. Zafiropoulo, Mark William Miller | 2004-08-17 |
| 6413320 | Integrated processing system having multiple reactors connected to a central chamber | Joseph A. Maher, Joseph D. Napoli, Arthur W. Zafiropoulo, Mark William Miller | 2002-07-02 |
| 6214119 | Vacuum substrate processing system having multiple processing chambers and a central load/unload chamber | Joseph A. Maher, Joseph D. Napoli, Arthur W. Zafiropoulo, Mark William Miller | 2001-04-10 |
| 6103055 | System for processing substrates | Joseph A. Maher, Joseph D. Napoli, Arthur W. Zafiropoulo, Mark William Miller | 2000-08-15 |
| 5344542 | Multiple-processing and contamination-free plasma etching system | Joseph A. Maher, Joseph D. Napoli, Arthur W. Zafiropoulo, Mark William Miller | 1994-09-06 |
| 5308431 | System providing multiple processing of substrates | Joseph A. Maher, Joseph D. Napoli, Arthur W. Zafiropoulo, Mark William Miller | 1994-05-03 |
| 5102495 | Method providing multiple-processing of substrates | Joseph A. Maher, Joseph D. Napoli, Arthur W. Zafiropoulo, Mark William Miller | 1992-04-07 |
| 5076205 | Modular vapor processor system | Joseph A. Maher, Joseph D. Napoli | 1991-12-31 |
| 5013385 | Quad processor | Joseph A. Maher, Joseph D. Napoli, Arthur W. Zafiropoulo, Mark William Miller | 1991-05-07 |
| 5013400 | Dry etch process for forming champagne profiles, and dry etch apparatus | Howard Kurasaki, Barbara F. Westlund, James E. Nulty | 1991-05-07 |
| 4715921 | Quad processor | Joseph A. Maher, Joseph D. Napoli, Arthur W. Zafiropoulo, Mark William Miller | 1987-12-29 |