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Method for etching and/or patterning a silicon-containing layer |
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Probe card with an adapter layer for testing integrated circuits |
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Structure having reduced lateral spacer erosion |
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2001-04-10 |
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— |
1996-10-08 |
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Method of etching an oxide layer |
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Method for forming a stable plasma |
— |
1995-08-15 |
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— |
1991-09-03 |
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Endpoint detection system and method for plasma etching |
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1990-09-04 |