Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6406640 | Plasma etching method | Chan-Lon Yang, Usha Raghuram, Daniel Arnzen, James E. Nulty | 2002-06-18 |
| 6165375 | Plasma etching method | Chan-Lon Yang, Usha Raghuram, Daniel Arnzen, James E. Nulty | 2000-12-26 |