Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9134186 | Process condition measuring device (PCMD) and method for measuring process conditions in a workpiece processing tool configured to process production workpieces | Mei Sun, Farhat A. Quli, Earl Jensen, Vaibhaw Vishal | 2015-09-15 |
| 6373679 | ELECTROSTATIC OR MECHANICAL CHUCK ASSEMBLY CONFERRING IMPROVED TEMPERATURE UNIFORMITY ONTO WORKPIECES HELD THEREBY, WORKPIECE PROCESSING TECHNOLOGY AND/OR APPARATUS CONTAINING THE SAME, AND METHOD(S) FOR HOLDING AND/OR PROCESSING A WORKPIECE WITH THE SAME | Jianmin Qiao, James E. Nulty, Siamak Salimian | 2002-04-16 |
| 6184150 | Oxide etch process with high selectivity to nitride suitable for use on surfaces of uneven topography | Chan-Lon Yang, Mei Chang, Haojiang Li, Hyman J. Levinstein | 2001-02-06 |
| 5880037 | Oxide etch process using a mixture of a fluorine-substituted hydrocarbon and acetylene that provides high selectivity to nitride and is suitable for use on surfaces of uneven topography | — | 1999-03-09 |
| 5176790 | Process for forming a via in an integrated circuit structure by etching through an insulation layer while inhibiting sputtering of underlying metal | Jon Henri, Graham W. Hills, Jerry Wong, Robert Wu | 1993-01-05 |