| 9134186 |
Process condition measuring device (PCMD) and method for measuring process conditions in a workpiece processing tool configured to process production workpieces |
Mei Sun, Farhat A. Quli, Earl Jensen, Vaibhaw Vishal |
2015-09-15 |
| 6373679 |
ELECTROSTATIC OR MECHANICAL CHUCK ASSEMBLY CONFERRING IMPROVED TEMPERATURE UNIFORMITY ONTO WORKPIECES HELD THEREBY, WORKPIECE PROCESSING TECHNOLOGY AND/OR APPARATUS CONTAINING THE SAME, AND METHOD(S) FOR HOLDING AND/OR PROCESSING A WORKPIECE WITH THE SAME |
Jianmin Qiao, James E. Nulty, Siamak Salimian |
2002-04-16 |
| 6184150 |
Oxide etch process with high selectivity to nitride suitable for use on surfaces of uneven topography |
Chan-Lon Yang, Mei Chang, Haojiang Li, Hyman J. Levinstein |
2001-02-06 |
| 5880037 |
Oxide etch process using a mixture of a fluorine-substituted hydrocarbon and acetylene that provides high selectivity to nitride and is suitable for use on surfaces of uneven topography |
— |
1999-03-09 |
| 5176790 |
Process for forming a via in an integrated circuit structure by etching through an insulation layer while inhibiting sputtering of underlying metal |
Jon Henri, Graham W. Hills, Jerry Wong, Robert Wu |
1993-01-05 |
