Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936842 | Method and apparatus for process monitoring | Suraj Rengarajan, Michael Anthony Wood, Moshe Sarfaty, Kevin Song | 2005-08-30 |
| 6579730 | Monitoring process for oxide removal | Peijun Ding, Suraj Rengarajan | 2003-06-17 |
| 6184150 | Oxide etch process with high selectivity to nitride suitable for use on surfaces of uneven topography | Chan-Lon Yang, Mei Chang, Paul Arleo, Hyman J. Levinstein | 2001-02-06 |
| 6009830 | Independent gas feeds in a plasma reactor | Robert Wu | 2000-01-04 |