Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11150140 | Instrumented substrate apparatus for acquiring measurement parameters in high temperature process applications | Mei Sun | 2021-10-19 |
| 10083852 | Floating wafer chuck | Aviv Balan | 2018-09-25 |
| 9514970 | Methods of attaching a module on wafer substrate | Andrew Nguyen, Kristopher K. Hearn, Mei Sun | 2016-12-06 |
| 9134186 | Process condition measuring device (PCMD) and method for measuring process conditions in a workpiece processing tool configured to process production workpieces | Mei Sun, Farhat A. Quli, Earl Jensen, Paul Arleo | 2015-09-15 |
| 8681493 | Heat shield module for substrate-like metrology device | Mei Sun | 2014-03-25 |