Issued Patents All Time
Showing 25 most recent of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823925 | Encapsulated instrumented substrate apparatus for acquiring measurement parameters in high temperature process applications | Earl Jensen, Jing Zhou, Ran Liu | 2023-11-21 |
| 11150140 | Instrumented substrate apparatus for acquiring measurement parameters in high temperature process applications | Vaibhaw Vishal | 2021-10-19 |
| 10777393 | Process condition sensing device and method for plasma chamber | Earl Jensen | 2020-09-15 |
| 10720350 | Etch-resistant coating on sensor wafers for in-situ measurement | Andrew Nguyen, Farhat A. Quli, Vasudev Venkatesan | 2020-07-21 |
| 10460966 | Encapsulated instrumented substrate apparatus for acquiring measurement parameters in high temperature process applications | Earl Jensen, Jing Zhou, Ran Liu | 2019-10-29 |
| 10215626 | Method and system for measuring radiation and temperature exposure of wafers along a fabrication process line | Earl Jensen, Kevin O'Brien | 2019-02-26 |
| 9964440 | Wafer level spectrometer | Earl Jensen, Kevin O'Brien | 2018-05-08 |
| 9823121 | Method and system for measuring radiation and temperature exposure of wafers along a fabrication process line | Earl Jensen, Kevin O'Brien | 2017-11-21 |
| 9719867 | Method and system for measuring heat flux | Stephen Sharratt, Farhat A. Quli, Earl Jensen | 2017-08-01 |
| 9360302 | Film thickness monitor | Earl Jensen, Kevin O'Brien, Farhat A. Quli | 2016-06-07 |
| 9222842 | High temperature sensor wafer for in-situ measurements in active plasma | Earl Jensen, Farhat A. Quli, Stephen Sharratt | 2015-12-29 |
| 9140604 | Wafer level spectrometer | Earl Jensen, Kevin O'Brien | 2015-09-22 |
| 9134186 | Process condition measuring device (PCMD) and method for measuring process conditions in a workpiece processing tool configured to process production workpieces | Farhat A. Quli, Earl Jensen, Paul Arleo, Vaibhaw Vishal | 2015-09-15 |
| 8889021 | Process condition sensing device and method for plasma chamber | Earl Jensen | 2014-11-18 |
| 8681493 | Heat shield module for substrate-like metrology device | Vaibhaw Vishal | 2014-03-25 |
| 8604361 | Component package for maintaining safe operating temperature of components | Pascal CHAMPAGNE | 2013-12-10 |
| 8104342 | Process condition measuring device | Mark Wiltse, Wayne G. Renken, Zachary Reid, Tony DiBiase | 2012-01-31 |
| 8033190 | Process condition sensing wafer and data analysis system | Wayne G. Renken | 2011-10-11 |
| 7924408 | Temperature effects on overlay accuracy | Tony DiBiase, Mark Wiltse | 2011-04-12 |
| 7855549 | Integrated process condition sensing wafer and data analysis system | Wayne G. Renken, Earl Jensen, Roy Gordon, Brian Paquette | 2010-12-21 |
| 7757574 | Process condition sensing wafer and data analysis system | Wayne G. Renken | 2010-07-20 |
| 7698952 | Pressure sensing device | Wayne G. Renken, Aron Abramowski Mason, Lynn K. Wiese | 2010-04-20 |
| 7497134 | Process condition measuring device and method for measuring shear force on a surface of a substrate that undergoes a polishing or planarization process | Wayne G. Renken, Aron Abramowski Mason | 2009-03-03 |
| 7135852 | Integrated process condition sensing wafer and data analysis system | Wayne G. Renken, Earl Jensen, Roy Gordon, Brian Paquette | 2006-11-14 |
| 6915589 | Sensor positioning systems and methods | Richard Schwaninger, Wayne G. Renken | 2005-07-12 |