Wayne G. Renken — 26 Patents at Sensarray

Wayne G. Renken has been granted 26 US patents while listed as an inventor at Sensarray. The first was granted in 1985 and the most recent in October 2015. Wayne G. Renken ranks #150,017 of 4,157,543 US inventors in our database (top 3.6%). Patent records list Wayne G. Renken in San Jose, CA, US.

Issued Patents All Time

Showing 1–25 of 26 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
9165846	Process condition sensing wafer and data analysis system	—	2015-10-20
8104342	Process condition measuring device	Mei Sun, Mark Wiltse, Zachary Reid, Tony DiBiase	2012-01-31	$16,481,000
8046193	Determining process condition in substrate processing module	Forrest Gilbert Yetter, Jr., Jeffrey M. Parker, John B. Pieper	2011-10-25	$7,626,000
8033190	Process condition sensing wafer and data analysis system	Mei Sun	2011-10-11	$41,799,000
7855549	Integrated process condition sensing wafer and data analysis system	Earl Jensen, Roy Gordon, Brian Paquette, Mei Sun	2010-12-21	$18,037,000
7819033	Process condition sensing wafer and data analysis system	—	2010-10-26
7757574	Process condition sensing wafer and data analysis system	Mei Sun	2010-07-20	$9,726,000
7698952	Pressure sensing device	Mei Sun, Aron Abramowski Mason, Lynn K. Wiese	2010-04-20	$39,863,000
7497134	Process condition measuring device and method for measuring shear force on a surface of a substrate that undergoes a polishing or planarization process	Mei Sun, Aron Abramowski Mason	2009-03-03	$9,395,000
7360463	Process condition sensing wafer and data analysis system	—	2008-04-22
7363195	Methods of configuring a sensor network	Forrest Gilbert Yetter, Jr., Jeffrey M. Parker, John B. Pieper	2008-04-22
7156924	System and method for heating and cooling wafer at accelerated rates	—	2007-01-02
7151366	Integrated process condition sensing wafer and data analysis system	Earl Jensen, Roy Gordon	2006-12-19
7149643	Integrated process condition sensing wafer and data analysis system	Earl Jensen, Roy Gordon	2006-12-12
7135852	Integrated process condition sensing wafer and data analysis system	Earl Jensen, Roy Gordon, Brian Paquette, Mei Sun	2006-11-14
6915589	Sensor positioning systems and methods	Mei Sun, Richard Schwaninger	2005-07-12
6889568	Process condition sensing wafer and data analysis system	—	2005-05-10
6616332	Optical techniques for measuring parameters such as temperature across a surface	Mei Sun, Arwa Ginwalla	2003-09-09
6325536	Integrated wafer temperature sensors	Mei Sun, Paul V. Miller, Roy Gordon, Peter Michael Noel Vandenabeele	2001-12-04
6190040	Apparatus for sensing temperature on a substrate in an integrated circuit fabrication tool	Mei Sun	2001-02-20
5967661	Temperature calibration substrate	Peter Vandenabeele	1999-10-19
5746513	Temperature calibration substrate	—	1998-05-05
4690371	Electromagnetic valve with permanent magnet armature	Robert W. Bosley, Samson Kirshman, Dan B. LeMay	1987-09-01
4685331	Thermal mass flowmeter and controller	Dan B. LeMay, Ricardo M. Takahashi	1987-08-11
4647133	Electrical interconnect system	Douglas W. Heigel, Ronald G. Payne	1987-03-03

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Wayne G. Renken — 26 Patents

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