Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9165846 | Process condition sensing wafer and data analysis system | — | 2015-10-20 |
| 8104342 | Process condition measuring device | Mei Sun, Mark Wiltse, Zachary Reid, Tony DiBiase | 2012-01-31 |
| 8046193 | Determining process condition in substrate processing module | Forrest Gilbert Yetter, Jr., Jeffrey M. Parker, John B. Pieper | 2011-10-25 |
| 8033190 | Process condition sensing wafer and data analysis system | Mei Sun | 2011-10-11 |
| 7855549 | Integrated process condition sensing wafer and data analysis system | Earl Jensen, Roy Gordon, Brian Paquette, Mei Sun | 2010-12-21 |
| 7819033 | Process condition sensing wafer and data analysis system | — | 2010-10-26 |
| 7757574 | Process condition sensing wafer and data analysis system | Mei Sun | 2010-07-20 |
| 7698952 | Pressure sensing device | Mei Sun, Aron Abramowski Mason, Lynn K. Wiese | 2010-04-20 |
| 7497134 | Process condition measuring device and method for measuring shear force on a surface of a substrate that undergoes a polishing or planarization process | Mei Sun, Aron Abramowski Mason | 2009-03-03 |
| 7360463 | Process condition sensing wafer and data analysis system | — | 2008-04-22 |
| 7363195 | Methods of configuring a sensor network | Forrest Gilbert Yetter, Jr., Jeffrey M. Parker, John B. Pieper | 2008-04-22 |
| 7156924 | System and method for heating and cooling wafer at accelerated rates | — | 2007-01-02 |
| 7151366 | Integrated process condition sensing wafer and data analysis system | Earl Jensen, Roy Gordon | 2006-12-19 |
| 7149643 | Integrated process condition sensing wafer and data analysis system | Earl Jensen, Roy Gordon | 2006-12-12 |
| 7135852 | Integrated process condition sensing wafer and data analysis system | Earl Jensen, Roy Gordon, Brian Paquette, Mei Sun | 2006-11-14 |
| 6915589 | Sensor positioning systems and methods | Mei Sun, Richard Schwaninger | 2005-07-12 |
| 6889568 | Process condition sensing wafer and data analysis system | — | 2005-05-10 |
| 6616332 | Optical techniques for measuring parameters such as temperature across a surface | Mei Sun, Arwa Ginwalla | 2003-09-09 |
| 6325536 | Integrated wafer temperature sensors | Mei Sun, Paul V. Miller, Roy Gordon, Peter Michael Noel Vandenabeele | 2001-12-04 |
| 6190040 | Apparatus for sensing temperature on a substrate in an integrated circuit fabrication tool | Mei Sun | 2001-02-20 |
| 5967661 | Temperature calibration substrate | Peter Vandenabeele | 1999-10-19 |
| 5746513 | Temperature calibration substrate | — | 1998-05-05 |
| 4690371 | Electromagnetic valve with permanent magnet armature | Robert W. Bosley, Samson Kirshman, Dan B. LeMay | 1987-09-01 |
| 4685331 | Thermal mass flowmeter and controller | Dan B. LeMay, Ricardo M. Takahashi | 1987-08-11 |
| 4647133 | Electrical interconnect system | Douglas W. Heigel, Ronald G. Payne | 1987-03-03 |