Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7698952 | Pressure sensing device | Wayne G. Renken, Mei Sun, Lynn K. Wiese | 2010-04-20 |
| 7497134 | Process condition measuring device and method for measuring shear force on a surface of a substrate that undergoes a polishing or planarization process | Wayne G. Renken, Mei Sun | 2009-03-03 |