Patents per Year
Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 8104342 | Process condition measuring device | Mei Sun, Wayne G. Renken, Zachary Reid, Tony DiBiase | 2012-01-31 | $16,481,000 |
| 7924408 | Temperature effects on overlay accuracy | Tony DiBiase, Mei Sun | 2011-04-12 | $7,605,000 |
| 7901250 | Electrical adapter for a connector having a retention latch | Bill KP Lam, Ian Lin | 2011-03-08 | $4,587,000 |
| 6537011 | Method and apparatus for transferring and supporting a substrate | Danny D. WANG, Dmitry Lubomirsky, Erwin Polar, Brigitte Stoehr, Yeuk-Fai Edwin Mok +1 more | 2003-03-25 | $28,989,000 |
| 5893643 | Apparatus for measuring pedestal temperature in a semiconductor wafer processing system | Ajay Kumar, Jeffrey D. Chinn, Shashank Deshmukh, Weinan Jiang, Brian Duda +3 more | 1999-04-13 | $105,936,000 |
| 5851926 | Method for etching transistor gates using a hardmask | Ajay Kumar, Jeffrey D. Chinn, Shashank Deshmukh, Weinan Jiang, Rolf Guenther +1 more | 1998-12-22 | $39,449,000 |