Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10452663 | Group user level association method and system | Yang Zhang, Weiquan HE | 2019-10-22 |
| 8480913 | Plasma processing method and apparatus with control of plasma excitation power | Tuqiang Ni, Frank Y. Lin, Chung-Ho Huang | 2013-07-09 |
| 6855567 | Etch endpoint detection | Tuqiang Ni, Andrew Lui, Chung-Ho Huang | 2005-02-15 |
| 6699399 | Self-cleaning etch process | Xue-Yu Qian, Zhi-Wen Sun, Arthur Y. Chen, Gerald Yin, Ming-Hsun Yang +5 more | 2004-03-02 |
| 6617257 | Method of plasma etching organic antireflective coating | Tuqiang Ni, Conan Chiang, Frank Y. Lin, Chris Lee, Dai N. Lee | 2003-09-09 |
| 6136211 | Self-cleaning etch process | Xue-Yu Qian, Zhi-Wen Sun, Arthur Y. Chen, Gerald Yin, Ming-Hsun Yang +5 more | 2000-10-24 |
| 5978202 | Electrostatic chuck having a thermal transfer regulator pad | Ralph Wadensweiler, Ajay Kumar, Shashank Deshmukh, Rolf Guenther | 1999-11-02 |
| 5893643 | Apparatus for measuring pedestal temperature in a semiconductor wafer processing system | Ajay Kumar, Jeffrey D. Chinn, Shashank Deshmukh, Brian Duda, Rolf Guenther +3 more | 1999-04-13 |
| 5851926 | Method for etching transistor gates using a hardmask | Ajay Kumar, Jeffrey D. Chinn, Shashank Deshmukh, Rolf Guenther, Bruce Minaee +1 more | 1998-12-22 |