Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387134 | Data capture and transformation to support data analysis and machine learning for substrate manufacturing systems | Vincent Wong, Paul Ballintine, Henry T. Chan, Nicolas Grinschgl, John Jensen +2 more | 2025-08-12 |
| 12181849 | Control of semiconductor manufacturing equipment in mixed reality environments | Rainer Unterguggenberger, Christopher Thorgrimsson, Henry T. Chan, Terrence George Bernier | 2024-12-31 |
| 12072689 | Model-based scheduling for substrate processing systems | Raymond Chau, Henry T. Chan, Vincent Wong, Yu Ding, Ngoc-Diep Nguyen +1 more | 2024-08-27 |
| 11429409 | Software emulator for hardware components in a gas delivery system of substrate processing system | Bostjan Pust, Tom Trinh | 2022-08-30 |
| 10747210 | System and method for automating user interaction for semiconductor manufacturing equipment | Rainer Unterguggenberger, Henry T. Chan, Vincent Wong, David Hemker | 2020-08-18 |
| 9927798 | Mobile connectivity and control of semiconductor manufacturing equipment | Roger Patrick, Simon Gosselin, Vincent Wong, Ronald Ramnarine, Neal Newton +4 more | 2018-03-27 |
| 9871759 | Social network service for semiconductor manufacturing equipment and users | Henry T. Chan, Chad R. Weetman, David Hemker | 2018-01-16 |
| 9736135 | Method, apparatus, and system for establishing a virtual tether between a mobile device and a semiconductor processing tool | Chris Thorgrimsson, Chad R. Weetman, Paul Ballintine, Vincent Wong, Henry T. Chan | 2017-08-15 |
| 8983631 | Arrangement for identifying uncontrolled events at the process module level and methods thereof | Vijayakumar C. Venugopal, Connie Lam, Dragan Podlesnik | 2015-03-17 |
| 8906163 | Methods and apparatus for integrating and controlling a plasma processing system | Cheng-Chieh Lin | 2014-12-09 |
| 8480913 | Plasma processing method and apparatus with control of plasma excitation power | Tuqiang Ni, Weinan Jiang, Frank Y. Lin | 2013-07-09 |
| 8295963 | Methods for performing data management for a recipe-and-component control module | Andrew Lui | 2012-10-23 |
| 8185242 | Dynamic alignment of wafers using compensation values obtained through a series of wafer movements | Scott Wong, Jeffrey Lin, Andrew D. Bailey, III, Jack Chen, Benjamin W. Mooring | 2012-05-22 |
| 8010483 | Component-tracking system and methods therefor | Hae-Pyng Jea, Tung Hsu, Jackie Seto | 2011-08-30 |
| 8000827 | Processing information management system in a plasma processing tool | Chad R. Weetman, Jacqueline Seto, John Jensen | 2011-08-16 |
| 7899627 | Automatic dynamic baseline creation and adjustment | Jackie Seto, Nicolas Bright | 2011-03-01 |
| 7882076 | Primary server architectural networking arrangement and methods therefor | Chad R. Weetman | 2011-02-01 |
| 7814046 | Dynamic component-tracking system and methods therefor | Hae-Pyng Jea, Tung Hsu, Jackie Seto | 2010-10-12 |
| 7672747 | Recipe-and-component control module and methods thereof | Andrew Lui | 2010-03-02 |
| 7565220 | Targeted data collection architecture | Shih-Jeun Fan | 2009-07-21 |
| 7558641 | Recipe report card framework and methods thereof | Robert C. Hefty, Andrew Lui, Dave Humbird, Charles Potter | 2009-07-07 |
| 7542820 | Methods and arrangement for creating recipes using best-known methods | Shih-Jeun Fan, Chin-Chuan Chang, Nicolas Bright | 2009-06-02 |
| 7536538 | Cluster tools for processing substrates using at least a key file | Shih-Jeun Fan, Chin-Chuan Chang | 2009-05-19 |
| 7469195 | Integrated stepwise statistical process control in a plasma processing system | John Jensen | 2008-12-23 |
| 7356580 | Plug and play sensor integration for a process module | Andrew Lui, David Hemker | 2008-04-08 |