Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7353379 | Methods for configuring a plasma cluster tool | Shih-Jeun Fan, Chin-Chuan Chang | 2008-04-01 |
| 7228257 | Architecture for general purpose programmable semiconductor processing system and methods therefor | Roger Patrick, Vincent Wong | 2007-06-05 |
| 7162317 | Methods and apparatus for configuring plasma cluster tools | Shih-Jeun Fan, Chin-Chuan Chang | 2007-01-09 |
| 6855567 | Etch endpoint detection | Tuqiang Ni, Andrew Lui, Weinan Jiang | 2005-02-15 |
| 6825050 | Integrated stepwise statistical process control in a plasma processing system | John Jensen | 2004-11-30 |
| 6622286 | Integrated electronic hardware for wafer processing control and diagnostic | Tuan Ngo, Farro Kaveh, Connie Lam, Tuqiang Ni, Anthony Le +1 more | 2003-09-16 |
| 6526355 | Integrated full wavelength spectrometer for wafer processing | Tuqiang Ni, Tuan Ngo, Andrew Lui, Farro Kaveh | 2003-02-25 |