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Computer system and method for monitoring key performance indicators (KPIs) online using time series pattern model |
Jian Ma, Hong Zhao, Ashok Rao, Willie K. C. Chan |
2021-02-16 |
| 8295963 |
Methods for performing data management for a recipe-and-component control module |
Chung-Ho Huang |
2012-10-23 |
| 7672747 |
Recipe-and-component control module and methods thereof |
Chung-Ho Huang |
2010-03-02 |
| 7558641 |
Recipe report card framework and methods thereof |
Chung-Ho Huang, Robert C. Hefty, Dave Humbird, Charles Potter |
2009-07-07 |
| 7356580 |
Plug and play sensor integration for a process module |
Chung-Ho Huang, David Hemker |
2008-04-08 |
| 6855567 |
Etch endpoint detection |
Tuqiang Ni, Chung-Ho Huang, Weinan Jiang |
2005-02-15 |
| 6815362 |
End point determination of process residues in wafer-less auto clean process using optical emission spectroscopy |
Vincent Wong, Brett C. Richardson, Scott Baldwin |
2004-11-09 |
| 6526355 |
Integrated full wavelength spectrometer for wafer processing |
Tuqiang Ni, Tuan Ngo, Chung-Ho Huang, Farro Kaveh |
2003-02-25 |
| 5008810 |
System for displaying different subsets of screen views, entering different amount of information, and determining correctness of input dependent upon current user input |
William Kessel, John L. Laclaire, Michael H. Locke, Herbert I. Britt |
1991-04-16 |
