Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9234775 | Methods for verifying gas flow rates from a gas supply system into a plasma processing chamber | Dean J. Larson, James V. Tietz, William S. Kennedy, Eric H. Lenz, William M. Denty, Jr. +1 more | 2016-01-12 |
| 8906248 | Silicon on insulator etch | Siyi Li, Mark Todhunter Robson, James R. Bowers, Audrey Charles | 2014-12-09 |
| 8394722 | Bi-layer, tri-layer mask CD control | Gerardo Delgadino | 2013-03-12 |
| 8236188 | Method for low-K dielectric etch with reduced damage | Bing Ji, Kenji Takeshita, Andrew D. Bailey, III, Eric A. Hudson, Maryam Moravej +6 more | 2012-08-07 |
| 8114780 | Method for dielectric material removal between conductive lines | Mayumi Block, Stephen M. Sirard, Kenji Takeshita | 2012-02-14 |
| 7558641 | Recipe report card framework and methods thereof | Chung-Ho Huang, Andrew Lui, Dave Humbird, Charles Potter | 2009-07-07 |
| 7291286 | Methods for removing black silicon and black silicon carbide from surfaces of silicon and silicon carbide electrodes for plasma processing apparatuses | Enrico Magni, Michael J. Kelly, Michelle Lupan | 2007-11-06 |
| 7226869 | Methods for protecting silicon or silicon carbide electrode surfaces from morphological modification during plasma etch processing | Kenji Takeshita, Tsuyoshi Aso, Seiji Kawaguchi, Thomas McClard, Wan-Lin Chen +3 more | 2007-06-05 |