Robert C. Hefty — 8 Patents at Lam Research

Robert C. Hefty has been granted 8 US patents while listed as an inventor at Lam Research. The first was granted in 2007 and the most recent in January 2016. Robert C. Hefty ranks #600,572 of 4,157,543 US inventors in our database (top 14.4%). Patent records list Robert C. Hefty in Mountain View, CA, US.

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Showing 1–8 of 8 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
9234775	Methods for verifying gas flow rates from a gas supply system into a plasma processing chamber	Dean J. Larson, James V. Tietz, William S. Kennedy, Eric H. Lenz, William M. Denty, Jr. +1 more	2016-01-12	$16,109,000
8906248	Silicon on insulator etch	Siyi Li, Mark Todhunter Robson, James R. Bowers, Audrey Charles	2014-12-09	$7,792,000
8394722	Bi-layer, tri-layer mask CD control	Gerardo Delgadino	2013-03-12	$11,235,000
8236188	Method for low-K dielectric etch with reduced damage	Bing Ji, Kenji Takeshita, Andrew D. Bailey, III, Eric A. Hudson, Maryam Moravej +6 more	2012-08-07	$20,329,000
8114780	Method for dielectric material removal between conductive lines	Mayumi Block, Stephen M. Sirard, Kenji Takeshita	2012-02-14	$17,467,000
7558641	Recipe report card framework and methods thereof	Chung-Ho Huang, Andrew Lui, Dave Humbird, Charles Potter	2009-07-07	$39,399,000
7291286	Methods for removing black silicon and black silicon carbide from surfaces of silicon and silicon carbide electrodes for plasma processing apparatuses	Enrico Magni, Michael J. Kelly, Michelle Lupan	2007-11-06	$43,055,000
7226869	Methods for protecting silicon or silicon carbide electrode surfaces from morphological modification during plasma etch processing	Kenji Takeshita, Tsuyoshi Aso, Seiji Kawaguchi, Thomas McClard, Wan-Lin Chen +3 more	2007-06-05	$15,368,000

Robert C. Hefty — 8 Patents

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