Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9234775 | Methods for verifying gas flow rates from a gas supply system into a plasma processing chamber | Dean J. Larson, Robert C. Hefty, James V. Tietz, William S. Kennedy, Eric H. Lenz +1 more | 2016-01-12 |
| 9093483 | Showerhead electrode assembly with gas flow modification for extended electrode life | Jason Augustino, Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Rajinder Dhindsa +4 more | 2015-07-28 |
| 8801892 | Uniform etch system | Dean J. Larson, Babak Kadkhodayan, Di Wu, Kenji Takeshita, Bi-Ming Yen +2 more | 2014-08-12 |
| 8709202 | Upper electrode backing member with particle reducing features | Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Jason Augustino, Rajinder Dhindsa +4 more | 2014-04-29 |
| 8702866 | Showerhead electrode assembly with gas flow modification for extended electrode life | Jason Augustino, Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Rajinder Dhindsa +4 more | 2014-04-22 |
| 7854820 | Upper electrode backing member with particle reducing features | Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Jason Augustino, Rajinder Dhindsa +4 more | 2010-12-21 |
| 7371332 | Uniform etch system | Dean J. Larson, Babak Kadkhodayan, Di Wu, Kenji Takeshita, Bi-Ming Yen +2 more | 2008-05-13 |
| 7169231 | Gas distribution system with tuning gas | Dean J. Larson, Babak Kadkhodayan, Di Wu, Kenji Takeshita, Bi-Ming Yen +2 more | 2007-01-30 |
| 6277237 | Chamber liner for semiconductor process chambers | Alan M. Schoepp, Michael Barnes | 2001-08-21 |
| 6170429 | Chamber liner for semiconductor process chambers | Alan M. Schoepp, Michael Barnes | 2001-01-09 |