Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12100575 | Plasma processing devices having multi-port valve assemblies | Daniel Arthur Brown, Michael C. Kellogg, Leonard J. Sharpless, James E. Tappan | 2024-09-24 |
| 11282737 | Moving substrate transfer chamber | Daniel Arthur Brown, Leonard J. Sharpless, Christopher W. Burkhart | 2022-03-22 |
| 10037869 | Plasma processing devices having multi-port valve assemblies | Daniel Arthur Brown, Michael C. Kellogg, Leonard J. Sharpless, James E. Tappan | 2018-07-31 |
| 9093483 | Showerhead electrode assembly with gas flow modification for extended electrode life | Jason Augustino, Anthony de la Llera, Jaehyun Kim, Rajinder Dhindsa, Yen-Kun Wang +4 more | 2015-07-28 |
| 8970114 | Temperature controlled window of a plasma processing chamber component | Matt Busche, Adam Mace, Michael Kang | 2015-03-03 |
| 8945317 | System and method for cleaning gas injectors | Armen Avoyan, Cliff La Croix, Hong Shih, John Daugherty, Catherine Zhou | 2015-02-03 |
| 8854451 | Automated bubble detection apparatus and method | Josh Cormier, Fangli Hao, Hong Shih, Tuochuan Huang, John Daugherty +1 more | 2014-10-07 |
| 8709202 | Upper electrode backing member with particle reducing features | Anthony de la Llera, Jaehyun Kim, Jason Augustino, Rajinder Dhindsa, Yen-Kun Wang +4 more | 2014-04-29 |
| 8702866 | Showerhead electrode assembly with gas flow modification for extended electrode life | Jason Augustino, Anthony de la Llera, Jaehyun Kim, Rajinder Dhindsa, Yen-Kun Wang +4 more | 2014-04-22 |
| 8597428 | Vacuum sealing radio frequency (RF) and low frequency conducting actuator | Danny Brown, Arthur H. Sato, John Daugherty, Leonard J. Sharpless | 2013-12-03 |
| 7854820 | Upper electrode backing member with particle reducing features | Anthony de la Llera, Jaehyun Kim, Jason Augustino, Rajinder Dhindsa, Yen-Kun Wang +4 more | 2010-12-21 |
| 7685965 | Apparatus for shielding process chamber port | Fangli Hao, John Daugherty | 2010-03-30 |