Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8970114 | Temperature controlled window of a plasma processing chamber component | Adam Mace, Michael Kang, Allan K. Ronne | 2015-03-03 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8970114 | Temperature controlled window of a plasma processing chamber component | Adam Mace, Michael Kang, Allan K. Ronne | 2015-03-03 |