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Matt Busche

Lam Research: 1 patents #1,364 of 2,128Top 65%
Overall (All Time): #3,041,309 of 4,157,543Top 75%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
8970114 Temperature controlled window of a plasma processing chamber component Adam Mace, Michael Kang, Allan K. Ronne 2015-03-03