Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340989 | Electrostatic edge ring mounting system for substrate processing | Alexander Matyushkin, Keith Comendant, Darrell Ehrlich, John Holland, Felix Kozakevich +1 more | 2025-06-24 |
| 8970114 | Temperature controlled window of a plasma processing chamber component | Matt Busche, Michael Kang, Allan K. Ronne | 2015-03-03 |