Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12100575 | Plasma processing devices having multi-port valve assemblies | Michael C. Kellogg, Leonard J. Sharpless, Allan K. Ronne, James E. Tappan | 2024-09-24 |
| 12027411 | Integrated tool lift | Paul Albert Avanzino, Jerrel K. Antolik, Jason Lee Treadwell | 2024-07-02 |
| 11495486 | Integrated tool lift | Paul Albert Avanzino, Jerrel K. Antolik, Jason Lee Treadwell | 2022-11-08 |
| 11282737 | Moving substrate transfer chamber | Leonard J. Sharpless, Allan K. Ronne, Christopher W. Burkhart | 2022-03-22 |
| 10665435 | Chamber with vertical support stem for symmetric conductance and RF delivery | John Holland, Michael C. Kellogg, James E. Tappan, Jerrel K. Antolik, Ian Kenworthy +2 more | 2020-05-26 |
| 10395902 | Chamber with vertical support stem for symmetric conductance and RF delivery | John Holland, Michael C. Kellogg, James E. Tappan, Jerrel K. Antolik, Ian Kenworthy +2 more | 2019-08-27 |
| 10332729 | Compression member for use in showerhead electrode assembly | Darrell Ehrlich, Ian Kenworthy | 2019-06-25 |
| 10074521 | Replaceable upper chamber parts of plasma processing apparatus | Jeffrey Bogart, Ian Kenworthy | 2018-09-11 |
| 10049862 | Chamber with vertical support stem for symmetric conductance and RF delivery | John Holland, Michael C. Kellogg, James E. Tappan, Jerrel K. Antolik, Ian Kenworthy +2 more | 2018-08-14 |
| 10037869 | Plasma processing devices having multi-port valve assemblies | Michael C. Kellogg, Leonard J. Sharpless, Allan K. Ronne, James E. Tappan | 2018-07-31 |
| 9922804 | Compression member for use in showerhead electrode assembly | Darrell Ehrlich, Ian Kenworthy | 2018-03-20 |
| 9076634 | Replaceable upper chamber parts of plasma processing apparatus | Jeff A. Bogart, Ian Kenworthy | 2015-07-07 |
| 9058960 | Compression member for use in showerhead electrode assembly | Darrell Ehrlich, Ian Kenworthy | 2015-06-16 |
| 8084705 | Quartz guard ring centering features | Dean J. Larson, Keith Comendant, Victor Wang | 2011-12-27 |
| 7939778 | Plasma processing chamber with guard ring for upper electrode assembly | Dean J. Larson, Saurabh Ullal | 2011-05-10 |
| 7875824 | Quartz guard ring centering features | Dean J. Larson, Keith Comendant, Victor Wang | 2011-01-25 |
| 7482550 | Quartz guard ring | Dean J. Larson, Saurabh Ullal | 2009-01-27 |
| 6658018 | Method and system of providing advanced teaming functionality capable of utilizing heterogeneous adapters to improve utility and performance | Han Tran, Gangadhar D. Bhat | 2003-12-02 |
| D398481 | Tray for holding a plate and drinking vessel | Jolie Brown | 1998-09-22 |
| D371809 | Game board | — | 1996-07-16 |