| 12100575 |
Plasma processing devices having multi-port valve assemblies |
Michael C. Kellogg, Leonard J. Sharpless, Allan K. Ronne, James E. Tappan |
2024-09-24 |
| 12027411 |
Integrated tool lift |
Paul Albert Avanzino, Jerrel K. Antolik, Jason Lee Treadwell |
2024-07-02 |
| 11495486 |
Integrated tool lift |
Paul Albert Avanzino, Jerrel K. Antolik, Jason Lee Treadwell |
2022-11-08 |
| 11282737 |
Moving substrate transfer chamber |
Leonard J. Sharpless, Allan K. Ronne, Christopher W. Burkhart |
2022-03-22 |
| 10665435 |
Chamber with vertical support stem for symmetric conductance and RF delivery |
John Holland, Michael C. Kellogg, James E. Tappan, Jerrel K. Antolik, Ian Kenworthy +2 more |
2020-05-26 |
| 10395902 |
Chamber with vertical support stem for symmetric conductance and RF delivery |
John Holland, Michael C. Kellogg, James E. Tappan, Jerrel K. Antolik, Ian Kenworthy +2 more |
2019-08-27 |
| 10332729 |
Compression member for use in showerhead electrode assembly |
Darrell Ehrlich, Ian Kenworthy |
2019-06-25 |
| 10074521 |
Replaceable upper chamber parts of plasma processing apparatus |
Jeffrey Bogart, Ian Kenworthy |
2018-09-11 |
| 10049862 |
Chamber with vertical support stem for symmetric conductance and RF delivery |
John Holland, Michael C. Kellogg, James E. Tappan, Jerrel K. Antolik, Ian Kenworthy +2 more |
2018-08-14 |
| 10037869 |
Plasma processing devices having multi-port valve assemblies |
Michael C. Kellogg, Leonard J. Sharpless, Allan K. Ronne, James E. Tappan |
2018-07-31 |
| 9922804 |
Compression member for use in showerhead electrode assembly |
Darrell Ehrlich, Ian Kenworthy |
2018-03-20 |
| 9076634 |
Replaceable upper chamber parts of plasma processing apparatus |
Jeff A. Bogart, Ian Kenworthy |
2015-07-07 |
| 9058960 |
Compression member for use in showerhead electrode assembly |
Darrell Ehrlich, Ian Kenworthy |
2015-06-16 |
| 8084705 |
Quartz guard ring centering features |
Dean J. Larson, Keith Comendant, Victor Wang |
2011-12-27 |
| 7939778 |
Plasma processing chamber with guard ring for upper electrode assembly |
Dean J. Larson, Saurabh Ullal |
2011-05-10 |
| 7875824 |
Quartz guard ring centering features |
Dean J. Larson, Keith Comendant, Victor Wang |
2011-01-25 |
| 7482550 |
Quartz guard ring |
Dean J. Larson, Saurabh Ullal |
2009-01-27 |
| 6658018 |
Method and system of providing advanced teaming functionality capable of utilizing heterogeneous adapters to improve utility and performance |
Han Tran, Gangadhar D. Bhat |
2003-12-02 |
| D398481 |
Tray for holding a plate and drinking vessel |
Jolie Brown |
1998-09-22 |
| D371809 |
Game board |
— |
1996-07-16 |
