Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406872 | Semiconductor processing chamber with dual-lift mechanism for edge ring elevation management | John Drewery | 2025-09-02 |
| 12100575 | Plasma processing devices having multi-port valve assemblies | Daniel Arthur Brown, Michael C. Kellogg, Leonard J. Sharpless, Allan K. Ronne | 2024-09-24 |
| 11302556 | Apparatus for spatial and temporal control of temperature on a substrate | Anthony J. Ricci, Keith Comendant | 2022-04-12 |
| 10665435 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, John Holland, Michael C. Kellogg, Jerrel K. Antolik, Ian Kenworthy +2 more | 2020-05-26 |
| 10636689 | Apparatus for spatial and temporal control of temperature on a substrate | Anthony J. Ricci, Keith Comendant | 2020-04-28 |
| 10395902 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, John Holland, Michael C. Kellogg, Jerrel K. Antolik, Ian Kenworthy +2 more | 2019-08-27 |
| 10049862 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, John Holland, Michael C. Kellogg, Jerrel K. Antolik, Ian Kenworthy +2 more | 2018-08-14 |
| 10037869 | Plasma processing devices having multi-port valve assemblies | Daniel Arthur Brown, Michael C. Kellogg, Leonard J. Sharpless, Allan K. Ronne | 2018-07-31 |
| 9103416 | Floating collar clamping device for auto-aligning nut and screw in linear motion leadscrew and nut assembly and methods thereof | — | 2015-08-11 |
| 8900404 | Plasma processing systems with mechanisms for controlling temperatures of components | — | 2014-12-02 |
| 8821639 | Apparatus for spatial and temporal control of temperature on a substrate | Anthony J. Ricci, Keith Comendant | 2014-09-02 |
| 8735298 | Method for spatial and temporal control of temperature on a substrate | Anthony J. Ricci, Keith Comendant | 2014-05-27 |
| 8735765 | Adjustable gap capacitively coupled RF plasma reactor including lateral bellows and non-contact particle seal | Scott Stevenot | 2014-05-27 |
| 8552334 | Adjustable gap capacitively coupled RF plasma reactor including lateral bellows and non-contact particle seal | Scott Stevenot | 2013-10-08 |
| 8438712 | Floating collar clamping device for auto-aligning nut and screw in linear motion leadscrew and nut assembly | — | 2013-05-14 |
| 8394233 | Electrode orientation and parallelism adjustment mechanism for plasma processing systems | — | 2013-03-12 |
| 8257548 | Electrode orientation and parallelism adjustment mechanism for plasma processing systems | — | 2012-09-04 |
| 8051556 | Method of manufacturing apparatus for spatial and temporal control of temperature on a substrate | Anthony J. Ricci, Keith Comendant | 2011-11-08 |
| 8038796 | Apparatus for spatial and temporal control of temperature on a substrate | Anthony J. Ricci, Keith Comendant | 2011-10-18 |
| 7439499 | Multiple electrospray probe interface for mass spectrometry | Thomas H. Bailey | 2008-10-21 |
| 7132080 | Module for automated matrix removal | Marc R. Anderson, Michael J. West | 2006-11-07 |
| 6998095 | Loop dilution system | Marc R. Anderson, Michael J. West | 2006-02-14 |
| 5368646 | Reaction chamber design to minimize particle generation in chemical vapor deposition reactors | Arthur K. Yasuda, Dean R. Denison, Randall S. Mundt | 1994-11-29 |
| 5200232 | Reaction chamber design and method to minimize particle generation in chemical vapor deposition reactors | Arthur K. Yasuda, Dean R. Denison, Randall S. Mundt | 1993-04-06 |