| 12406872 |
Semiconductor processing chamber with dual-lift mechanism for edge ring elevation management |
John Drewery |
2025-09-02 |
|
| 12100575 |
Plasma processing devices having multi-port valve assemblies |
Daniel Arthur Brown, Michael C. Kellogg, Leonard J. Sharpless, Allan K. Ronne |
2024-09-24 |
$887,300,000 |
| 11302556 |
Apparatus for spatial and temporal control of temperature on a substrate |
Anthony J. Ricci, Keith Comendant |
2022-04-12 |
$460,378,000 |
| 10665435 |
Chamber with vertical support stem for symmetric conductance and RF delivery |
Daniel Arthur Brown, John Holland, Michael C. Kellogg, Jerrel K. Antolik, Ian Kenworthy +2 more |
2020-05-26 |
$51,788,000 |
| 10636689 |
Apparatus for spatial and temporal control of temperature on a substrate |
Anthony J. Ricci, Keith Comendant |
2020-04-28 |
$53,406,000 |
| 10395902 |
Chamber with vertical support stem for symmetric conductance and RF delivery |
Daniel Arthur Brown, John Holland, Michael C. Kellogg, Jerrel K. Antolik, Ian Kenworthy +2 more |
2019-08-27 |
$43,634,000 |
| 10049862 |
Chamber with vertical support stem for symmetric conductance and RF delivery |
Daniel Arthur Brown, John Holland, Michael C. Kellogg, Jerrel K. Antolik, Ian Kenworthy +2 more |
2018-08-14 |
$33,763,000 |
| 10037869 |
Plasma processing devices having multi-port valve assemblies |
Daniel Arthur Brown, Michael C. Kellogg, Leonard J. Sharpless, Allan K. Ronne |
2018-07-31 |
$73,136,000 |
| 9103416 |
Floating collar clamping device for auto-aligning nut and screw in linear motion leadscrew and nut assembly and methods thereof |
— |
2015-08-11 |
$11,689,000 |
| 8900404 |
Plasma processing systems with mechanisms for controlling temperatures of components |
— |
2014-12-02 |
$6,421,000 |
| 8821639 |
Apparatus for spatial and temporal control of temperature on a substrate |
Anthony J. Ricci, Keith Comendant |
2014-09-02 |
$15,468,000 |
| 8735298 |
Method for spatial and temporal control of temperature on a substrate |
Anthony J. Ricci, Keith Comendant |
2014-05-27 |
$13,849,000 |
| 8735765 |
Adjustable gap capacitively coupled RF plasma reactor including lateral bellows and non-contact particle seal |
Scott Stevenot |
2014-05-27 |
$13,849,000 |
| 8552334 |
Adjustable gap capacitively coupled RF plasma reactor including lateral bellows and non-contact particle seal |
Scott Stevenot |
2013-10-08 |
$11,113,000 |
| 8438712 |
Floating collar clamping device for auto-aligning nut and screw in linear motion leadscrew and nut assembly |
— |
2013-05-14 |
$6,454,000 |
| 8394233 |
Electrode orientation and parallelism adjustment mechanism for plasma processing systems |
— |
2013-03-12 |
$11,235,000 |
| 8257548 |
Electrode orientation and parallelism adjustment mechanism for plasma processing systems |
— |
2012-09-04 |
$17,932,000 |
| 8051556 |
Method of manufacturing apparatus for spatial and temporal control of temperature on a substrate |
Anthony J. Ricci, Keith Comendant |
2011-11-08 |
$8,329,000 |
| 8038796 |
Apparatus for spatial and temporal control of temperature on a substrate |
Anthony J. Ricci, Keith Comendant |
2011-10-18 |
$14,793,000 |
| 7439499 |
Multiple electrospray probe interface for mass spectrometry |
Thomas H. Bailey |
2008-10-21 |
|
| 7132080 |
Module for automated matrix removal |
Marc R. Anderson, Michael J. West |
2006-11-07 |
|
| 6998095 |
Loop dilution system |
Marc R. Anderson, Michael J. West |
2006-02-14 |
|
| 5368646 |
Reaction chamber design to minimize particle generation in chemical vapor deposition reactors |
Arthur K. Yasuda, Dean R. Denison, Randall S. Mundt |
1994-11-29 |
$6,683,000 |
| 5200232 |
Reaction chamber design and method to minimize particle generation in chemical vapor deposition reactors |
Arthur K. Yasuda, Dean R. Denison, Randall S. Mundt |
1993-04-06 |
$4,860,000 |
