Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10665435 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, John Holland, Michael C. Kellogg, James E. Tappan, Jerrel K. Antolik +2 more | 2020-05-26 |
| 10395902 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, John Holland, Michael C. Kellogg, James E. Tappan, Jerrel K. Antolik +2 more | 2019-08-27 |
| 10049862 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, John Holland, Michael C. Kellogg, James E. Tappan, Jerrel K. Antolik +2 more | 2018-08-14 |
| 9953843 | Chamber for patterning non-volatile metals | Meihua Shen, Shuogang Huang, Thorsten Lill | 2018-04-24 |
| 9679751 | Chamber filler kit for plasma etch chamber useful for fast gas switching | Jon McChesney, Alex Paterson, Craig Blair | 2017-06-13 |
| 9011631 | Rapid and uniform gas switching for a plasma etch process | — | 2015-04-21 |
| 8133349 | Rapid and uniform gas switching for a plasma etch process | — | 2012-03-13 |