Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12205793 | Method and apparatus for anisotropic pattern etching and treatment | Seokmin Yun, Zhimin Wan, Mark Merrill | 2025-01-21 |
| 9953843 | Chamber for patterning non-volatile metals | Meihua Shen, Thorsten Lill, Theo Panagopoulos | 2018-04-24 |
| 9570320 | Method to etch copper barrier film | Meihua Shen, Ji Zhu, Baosuo Zhou, John Hoang, Prithu Sharma +1 more | 2017-02-14 |
| 9373518 | Method and apparatus for preventing native oxide regrowth | Edwin Adhiprakasha | 2016-06-21 |
| 8716145 | Critical concentration in etching doped poly silicon with HF/HNO3 | — | 2014-05-06 |
| 8632690 | Method and apparatus for preventing native oxide regrowth | Edwin Adhiprakasha | 2014-01-21 |