| 9373518 |
Method and apparatus for preventing native oxide regrowth |
Shuogang Huang |
2016-06-21 |
| 9297773 |
X-ray fluorescence analysis of thin-film coverage defects |
— |
2016-03-29 |
| 9297775 |
Combinatorial screening of metallic diffusion barriers |
Sean Barstow, Ashish Bodke, Zhendong Hong, Usha Raghuram, Karthik Ramani +3 more |
2016-03-29 |
| 9005366 |
In-situ reactor cleaning in high productivity combinatorial system |
— |
2015-04-14 |
| 8901677 |
Nucleation interface for high-k layer on germanium |
Frank Greer, Chi-I Lang, Ratsamee Limdulpaiboon, Sandip Niyogi, Kurt Pang +1 more |
2014-12-02 |
| 8795542 |
Removal of silicon nitrides during manufacturing of semiconductor devices |
— |
2014-08-05 |
| 8663977 |
Vertically retractable flow cell system |
— |
2014-03-04 |
| 8632690 |
Method and apparatus for preventing native oxide regrowth |
Shuogang Huang |
2014-01-21 |