Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Module for automated matrix removal

Module for automated matrix removal

US Patent 7132080 · Granted Nov 7, 2006

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Semiconductor processing chamber with dual-lift mechanism for edge ring elevatio2025
Forecasting of disinfection byproducts2025
Plasma processing devices having multi-port valve assemblies2024
Methods and apparatus for determination of halohydrocarbons2023
Apparatus for spatial and temporal control of temperature on a substrate2022
Methods and apparatus for determination of halohydrocarbons2020
Chamber with vertical support stem for symmetric conductance and RF delivery2020
Apparatus for spatial and temporal control of temperature on a substrate2020
Chamber with vertical support stem for symmetric conductance and RF delivery2019
Chamber with vertical support stem for symmetric conductance and RF delivery2018
Plasma processing devices having multi-port valve assemblies2018
Methods and apparatus for determination of halohydrocarbons2018