Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11302556 | Apparatus for spatial and temporal control of temperature on a substrate | Keith Comendant, James E. Tappan | 2022-04-12 |
| 11289306 | Ion beam etching utilizing cryogenic wafer temperatures | Thorsten Lill, Ivan L. Berry, III | 2022-03-29 |
| 11101107 | Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods | Neil Benjamin, Henry Povolny | 2021-08-24 |
| 10892197 | Edge seal configurations for a lower electrode assembly | Keith Gaff, Matthew Busche, Henry Povolny, Scott Stevenot | 2021-01-12 |
| 10892179 | Electrostatic chuck including clamp electrode assembly forming portion of Faraday cage for RF delivery and associated methods | Neil Benjamin, Henry Povolny | 2021-01-12 |
| 10879053 | Temperature controlled substrate support assembly | Henry Povolny | 2020-12-29 |
| 10636689 | Apparatus for spatial and temporal control of temperature on a substrate | Keith Comendant, James E. Tappan | 2020-04-28 |
| 10475623 | Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods | Neil Benjamin, Henry Povolny | 2019-11-12 |
| 10192767 | Ceramic electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control | Neil Benjamin, Henry Povolny | 2019-01-29 |
| 10090211 | Edge seal for lower electrode assembly | Keith Gaff, Matthew Busche, Henry Povolny, Scott Stevenot | 2018-10-02 |
| 10079168 | Ceramic electrostatic chuck including embedded Faraday cage for RF delivery and associated methods for operation, monitoring, and control | Neil Benjamin, Henry Povolny | 2018-09-18 |
| 10014161 | Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control | Neil Benjamin, Henry Povolny | 2018-07-03 |
| 9779955 | Ion beam etching utilizing cryogenic wafer temperatures | Thorsten Lill, Ivan L. Berry, III | 2017-10-03 |
| 9728429 | Parasitic plasma prevention in plasma processing chambers | Saurabh Ullal, Larry D. Martinez | 2017-08-08 |
| 9673025 | Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control | Neil Benjamin, Henry Povolny | 2017-06-06 |
| 9238670 | Aminoglycoside antibiotics with reduced ototoxicity | Robert Greenhouse, Alan G. Cheng | 2016-01-19 |
| 8821639 | Apparatus for spatial and temporal control of temperature on a substrate | Keith Comendant, James E. Tappan | 2014-09-02 |
| 8735298 | Method for spatial and temporal control of temperature on a substrate | Keith Comendant, James E. Tappan | 2014-05-27 |
| 8587113 | Thermal plate with planar thermal zones for semiconductor processing | Keith Gaff, Keith Comendant | 2013-11-19 |
| 8461674 | Thermal plate with planar thermal zones for semiconductor processing | Keith Gaff, Keith Comendant | 2013-06-11 |
| 8410393 | Apparatus and method for temperature control of a semiconductor substrate support | Saurabh Ullal, Michael Kang, Matthew Busche | 2013-04-02 |
| 8051556 | Method of manufacturing apparatus for spatial and temporal control of temperature on a substrate | Keith Comendant, James E. Tappan | 2011-11-08 |
| 8038796 | Apparatus for spatial and temporal control of temperature on a substrate | Keith Comendant, James E. Tappan | 2011-10-18 |
| 7431788 | Method of protecting a bond layer in a substrate support adapted for use in a plasma processing system | Jim Tappan, Keith Comendant | 2008-10-07 |
| 6408845 | Respiratory filter | Michael Pereira, Pierre Legare | 2002-06-25 |