Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6044842 | Gasketless connecting adapter | Michael Pereira, David Jarry | 2000-04-04 |
| 5548470 | Characterization, modeling, and design of an electrostatic chuck with improved wafer temperature uniformity | Anwar Husain, David E. Kotecki, Stephan Lassig, Kurt A. Olson | 1996-08-20 |