Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9865472 | Fabrication of a silicon structure and deep silicon etch with profile control | Robert Chebi, Frank Y. Lin, Jaroslaw W. Winniczek, Wan-Lin Chen, Erin Moore +3 more | 2018-01-09 |
| 9330926 | Fabrication of a silicon structure and deep silicon etch with profile control | Robert Chebi, Frank Y. Lin, Jaroslaw W. Winniczek, Wan-Lin Chen, Erin McDonnell +3 more | 2016-05-03 |
| 6875699 | Method for patterning multilevel interconnects | S. M. Reza Sadjadi, Vinay Pohray, Si Yi Li, Thomas W. Mountsier, Chiu Chi | 2005-04-05 |
| 5548470 | Characterization, modeling, and design of an electrostatic chuck with improved wafer temperature uniformity | Anwar Husain, David E. Kotecki, Kurt A. Olson, Anthony J. Ricci | 1996-08-20 |
| 4984902 | Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing | John L. Crowley, Ahmad Kermani, Noel H. Johnson, Gary R. Rickords | 1991-01-15 |
| 4969748 | Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing | John L. Crowley, Ahmad Kermani, Noel H. Johnson, Gary R. Rickords | 1990-11-13 |
| 4755654 | Semiconductor wafer heating chamber | John L. Crowley, Thomas J. DeBolski, Ahmad Kermani | 1988-07-05 |