| 8470126 |
Wiggling control for pseudo-hardmask |
Ben-Li Sheu, Rajinder Dhindsa, Eric A. Hudson, Andrew D. Bailey, III |
2013-06-25 |
| 8304262 |
Wiggling control for pseudo-hardmask |
Ben-Li Sheu, Rajinder Dhindsa, Eric A. Hudson, Andrew D. Bailey, III |
2012-11-06 |
| 7789991 |
Lag control |
Binet Worsham, Sean S. Kang, David Wei, Bi-Ming Yen |
2010-09-07 |
| 7307025 |
Lag control |
Binet Worsham, Sean S. Kang, David Wei, Bi-Ming Yen |
2007-12-11 |
| 6909195 |
Trench etch process for low-k dielectrics |
Siyi Li, S. M. Reza Sadjadi, David R. Pirkle, Steve Lassig, Sean S. Kang +1 more |
2005-06-21 |
| 6875699 |
Method for patterning multilevel interconnects |
Stephan Lassig, S. M. Reza Sadjadi, Si Yi Li, Thomas W. Mountsier, Chiu Chi |
2005-04-05 |
| 6794293 |
Trench etch process for low-k dielectrics |
Siyi Li, S. M. Reza Sadjadi, David R. Pirkle, Steve Lassig, Sean S. Kang +1 more |
2004-09-21 |
