| 7892445 |
Wafer electrical discharge control using argon free dechucking gas |
Howard Dang, Masahiro Watanabe, Sean S. Kang, Kenji Takeshita, Mayumi Block +2 more |
2011-02-22 |
| 7875548 |
Method for making semiconductor structures implementing sacrificial material |
Yehiel Gotkis, Rodney Kistler |
2011-01-25 |
| 7789991 |
Lag control |
Binet Worsham, Sean S. Kang, Vinay Pohray, Bi-Ming Yen |
2010-09-07 |
| 7495230 |
Using a polaron interaction zone as an interface to integrate a plasmon layer and a semiconductor detector |
Axel Scherer |
2009-02-24 |
| 7425501 |
Semiconductor structure implementing sacrificial material and methods for making and implementing the same |
Yehiel Gotkis, Rodney Kistler |
2008-09-16 |
| 7307025 |
Lag control |
Binet Worsham, Sean S. Kang, Vinay Pohray, Bi-Ming Yen |
2007-12-11 |
| 7297966 |
Utilizing an integrated plasmon detector to measure a metal deposit roughness on a semiconductor surface |
Axel Scherer |
2007-11-20 |
| 7018276 |
Air platen for leading edge and trailing edge control |
Anthony de la Llera, Xuyen Pham, Cangshan Xu, Tony Luong |
2006-03-28 |
| 6984892 |
Semiconductor structure implementing low-K dielectric materials and supporting stubs |
Yehiel Gotkis, Rodney Kistler |
2006-01-10 |
| 6976906 |
Apparatus for reducing compressed dry air usage during chemical mechanical planarization |
John M. Boyd, Yehiel Gotkis |
2005-12-20 |
| 6896586 |
Method and apparatus for heating polishing pad |
Xuyen Pham, Tuan Nguyen, Ren Zhou, Linda (Tong) Jiang, Katgenhalli Y. Ramanujam +4 more |
2005-05-24 |
| 6878048 |
CMP belt stretch compensation apparatus and methods for using the same |
Yehiel Gotkis, Aleksander Owzarz |
2005-04-12 |
| 6808442 |
Apparatus for removal/remaining thickness profile manipulation |
Yehiel Gotkis, Aleksander Owczarz, John M. Boyd, Rod Kistler |
2004-10-26 |
| 6761626 |
Air platen for leading edge and trailing edge control |
Anthony de la Llera, Xuyen Pham, Cangshan Xu, Tony Luong |
2004-07-13 |
| 6749491 |
CMP belt stretch compensation apparatus and methods for using the same |
Yehiel Gotkis, Aleksander Owzarz |
2004-06-15 |
| 6719874 |
Active retaining ring support |
Yehiel Gotkis, Aleksander Owczarz, Miguel Saldana, Damon Vincent Williams |
2004-04-13 |
| 6656024 |
Method and apparatus for reducing compressed dry air usage during chemical mechanical planarization |
John M. Boyd, Yehiel Gotkis |
2003-12-02 |
| 6190511 |
Method and apparatus for ion beam sputter deposition of thin films |
— |
2001-02-20 |
| RE32849 |
Method for fabricating multi-layer optical films |
Anthony W. Louderback |
1989-01-31 |
