Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7892445 | Wafer electrical discharge control using argon free dechucking gas | Howard Dang, Masahiro Watanabe, Sean S. Kang, Kenji Takeshita, Mayumi Block +2 more | 2011-02-22 |
| 7875548 | Method for making semiconductor structures implementing sacrificial material | Yehiel Gotkis, Rodney Kistler | 2011-01-25 |
| 7789991 | Lag control | Binet Worsham, Sean S. Kang, Vinay Pohray, Bi-Ming Yen | 2010-09-07 |
| 7495230 | Using a polaron interaction zone as an interface to integrate a plasmon layer and a semiconductor detector | Axel Scherer | 2009-02-24 |
| 7425501 | Semiconductor structure implementing sacrificial material and methods for making and implementing the same | Yehiel Gotkis, Rodney Kistler | 2008-09-16 |
| 7307025 | Lag control | Binet Worsham, Sean S. Kang, Vinay Pohray, Bi-Ming Yen | 2007-12-11 |
| 7297966 | Utilizing an integrated plasmon detector to measure a metal deposit roughness on a semiconductor surface | Axel Scherer | 2007-11-20 |
| 7018276 | Air platen for leading edge and trailing edge control | Anthony de la Llera, Xuyen Pham, Cangshan Xu, Tony Luong | 2006-03-28 |
| 6984892 | Semiconductor structure implementing low-K dielectric materials and supporting stubs | Yehiel Gotkis, Rodney Kistler | 2006-01-10 |
| 6976906 | Apparatus for reducing compressed dry air usage during chemical mechanical planarization | John M. Boyd, Yehiel Gotkis | 2005-12-20 |
| 6896586 | Method and apparatus for heating polishing pad | Xuyen Pham, Tuan Nguyen, Ren Zhou, Linda (Tong) Jiang, Katgenhalli Y. Ramanujam +4 more | 2005-05-24 |
| 6878048 | CMP belt stretch compensation apparatus and methods for using the same | Yehiel Gotkis, Aleksander Owzarz | 2005-04-12 |
| 6808442 | Apparatus for removal/remaining thickness profile manipulation | Yehiel Gotkis, Aleksander Owczarz, John M. Boyd, Rod Kistler | 2004-10-26 |
| 6761626 | Air platen for leading edge and trailing edge control | Anthony de la Llera, Xuyen Pham, Cangshan Xu, Tony Luong | 2004-07-13 |
| 6749491 | CMP belt stretch compensation apparatus and methods for using the same | Yehiel Gotkis, Aleksander Owzarz | 2004-06-15 |
| 6719874 | Active retaining ring support | Yehiel Gotkis, Aleksander Owczarz, Miguel Saldana, Damon Vincent Williams | 2004-04-13 |
| 6656024 | Method and apparatus for reducing compressed dry air usage during chemical mechanical planarization | John M. Boyd, Yehiel Gotkis | 2003-12-02 |
| 6190511 | Method and apparatus for ion beam sputter deposition of thin films | — | 2001-02-20 |
| RE32849 | Method for fabricating multi-layer optical films | Anthony W. Louderback | 1989-01-31 |